In-line surface metrology using dispersive interferometry

Activity: Talk or presentation typesInvited talk


Quality assurance performed in manufacturing environment requires the measurement system to be environmentally robust, fast, reliable, and easily integrated into machine. Optical techniques are most likely to meet the in-process metrology requirements due to their potential for high measurement resolution, non-destructive approach and fast response. This presentation focuses on the in-line surface metrology based on the dispersive interferometry and the potential applications.
Period23 Nov 2021
Event titleUltra Precision Manufacturing Workshop 2021
Event typeWorkshop
LocationChangchun, ChinaShow on map
Degree of RecognitionInternational