Activity: Talk or presentation types › Oral presentation
In this paper we present a single-shot Dual wavelength Polarised Interferometer (DPI)for measuring micro/nano-scale structured surfaces. The two wavelength interferometer is combined with a polarisation phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to freeze any unwanted environmental disturbances. The measurement results of using cross grating of 200 nm, 500 nm, and 1200 nm depth is presented. A measurement of 40 nm step height also is presented. The system has the potential to be used for measuring moving surfaces with the measuring range being limited by synthetic wavelength.
2018 IEEE International Instrumentation & Measurement Technology Conference: Discovering New Horizons in Instrumentation and Measurement