Enhanced wavelength scanning interferometer (WSI) for advanced manufacturing

Surface topography measurement is crucial for quality assurance in industries like semiconductors and flexible electronics. However, its adoption in production lines faces challenges from harsh environments and the need for a large dynamic measurement range. To address this, we developed a novel environmentally robust WSI technique with an extended measurement range via a unique objective lens. This project builds on the preliminary results to develop a pre-industrial prototype and conduct viability testing, advancing the technology readiness level (TRL) toward commercialization and disseminating IP (GB2024050681) in collaboration with our industrial partner, CUBIT.