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2019
Open Access
File
ion scattering
Pulsed laser deposition
Oxide films
pulsed laser deposition
Transition metals
2 Citations (Scopus)

Arsenic Plasma Doping in Si Characterized by High Resolution Medium Energy Ion Scattering Depth Profile Analysis

Van Den Berg, J. A., Rossall, A. K. & England, J., 22 Aug 2019, 2018 22nd International Conference on Ion Implantation Technology, IIT 2018 - Proceedings. Haublein, V. & Ryssel, H. (eds.). Institute of Electrical and Electronics Engineers Inc., Vol. 2018-September. p. 263-266 4 p. 8807964

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Arsenic
ion scattering
arsenic
Doping (additives)
Scattering
1 Citation (Scopus)
Open Access
File
Arsenic
ion scattering
Silicon
arsenic
Doping (additives)
1 Citation (Scopus)
Open Access
File
Arsenic
ion scattering
arsenic
Doping (additives)
Scattering
2017
17 Citations (Scopus)

Atomic Layer Deposition of Ruthenium Thin Films from (Ethylbenzyl) (1-Ethyl-1,4-cyclohexadienyl) Ru: Process Characteristics, Surface Chemistry, and Film Properties

Popovici, M., Groven, B., Marcoen, K., Phung, Q. M., Dutta, S., Swerts, J., Meersschaut, J., van den Berg, J. A., Franquet, A., Moussa, A., Vanstreels, K., Lagrain, P., Bender, H., Jurczak, M., Van Elshocht, S., Delabie, A. & Adelmann, C., 13 Jun 2017, In : Chemistry of Materials. 29, 11, p. 4654-4666 13 p.

Research output: Contribution to journalArticle

Ruthenium
Atomic layer deposition
Surface chemistry
Thin films
Surface reactions
6 Citations (Scopus)
Open Access
ion scattering
Doping (additives)
Scattering
Plasmas
Ions
1 Citation (Scopus)

Optical and structural characterization of Ge clusters embedded in ZrO2

Agocs, E., Zolnai, Z., Rossall, A. K., van den Berg, J. A., Fodor, B., Lehninger, D., Khomenkova, L., Ponomaryov, S., Gudymenko, O., Yukhymchuk, V., Kalas, B., Heitmann, J. & Petrik, P., 1 Nov 2017, In : Applied Surface Science. 421, Part B, p. 283-288 6 p.

Research output: Contribution to journalArticle

Open Access
Nanoclusters
Optical properties
Germanium
Spectroscopic ellipsometry
Rapid thermal annealing
2016
1 Citation (Scopus)
Open Access
Depth profiling
ion scattering
Scattering
Ions
scattering
2015
10 Citations (Scopus)

Understanding the EOT–Jg degradation in Ru/SrTiOx/Ru metal–insulator–metal capacitors formed with Ru atomic layer deposition

Popovici, M., Redolfi, A., Aoulaiche, M., Van Den Berg, J., Douhard, B., Swerts, J., Bailey, P., Kaczer, B., Groven, B., Meersschaut, J., Conard, T., Moussa, A., Adelmann, C., Delabie, A., Fazan, P., Van Elshocht, S. & Jurczak, M., 1 Nov 2015, In : Microelectronic Engineering. 147, p. 108-112 5 p.

Research output: Contribution to journalArticle

Atomic layer deposition
atomic layer epitaxy
capacitors
Capacitors
degradation
2013
2 Citations (Scopus)

Atomic layer deposition of Ti-HfO2 dielectrics

Werner, M., King, P. J., Hindley, S., Romani, S., Mather, S., Chalker, P. R., Williams, P. A. & Van Den Berg, J. A., Jan 2013, In : Journal of Vacuum Science and Technology A. 31, 1

Research output: Contribution to journalArticle

Atomic layer deposition
Permittivity
Amorphous films
Dielectric devices
Chemical analysis
1 Citation (Scopus)

Calibration correction of ultra low energy SIMS profiles based on MEIS analysis of shallow arsenic implants in silicon

Demenev, E., Giubertoni, D., Reading, M. A., Bailey, P., Noakes, T. C. Q., Bersani, M. & Van Den Berg, J. A., Jan 2013, In : Surface and Interface Analysis. 45, 1, p. 413-416 4 p.

Research output: Contribution to journalArticle

Arsenic
ion scattering
Silicon
Secondary ion mass spectrometry
arsenic
111 Citations (Scopus)

Ion Implantation of Graphene - Toward IC Compatible Technologies

Bangert, U., Pierce, W., Kepaptsoglou, D. M., Ramasse, Q., Zan, R., Gass, M. H., Van Den Berg, J. A., Boothroyd, C. B., Amani, J. & Hofsäss, H., 9 Oct 2013, In : Nano Letters. 13, 10, p. 4902-4907 6 p.

Research output: Contribution to journalArticle

Graphite
Ion implantation
Graphene
ion implantation
graphene
4 Citations (Scopus)

Medium energy ion scattering for the high depth resolution characterisation of high-k dielectric layers of nanometer thickness

Van Den Berg, J. A., Reading, M. A., Bailey, P., Noakes, T. Q. C., Adelmann, C., Popovici, M., Tielens, H., Conard, T., De Gendt, S. & Van Elshocht, S., 15 Sep 2013, In : Applied Surface Science. 281, p. 8-16 9 p.

Research output: Contribution to journalArticle

ion scattering
Multilayers
Scattering
Ions
Atoms
7 Citations (Scopus)

Understanding the Interface Reactions of Rutile TiO2 Grown by Atomic Layer Deposition on Oxidized Ruthenium

Popovici, M., Delabie, A., Adelmann, C., Meersschaut, J., Franquet, A., Tallarid, M., Van Den Berg, J., Richard, O., Swerts, J., Tomida, K., Kim, M-S., Tielens, H., Bender, H., Conard, T., Jurczak, M., Van Elshocht, S. & Schmeisser, D., 2013, In : ECS Journal of Solid State Science and Technology. 2, 1, p. N23-N27

Research output: Contribution to journalArticle

Ruthenium
Graphite
Atomic layer deposition
Graphene
Ion implantation
2012
1 Citation (Scopus)

An in-situ TEM study of the effects of 6 keV He ion irradiation on Si and SiO2

Donnelly, S. E., Hinks, J. A., Pawley, C. J., Abrams, K. J. & Van Den Berg, J. A., Sep 2012, In : Journal of Physics: Conference Series. 371, 012045.

Research output: Contribution to journalConference article

ion irradiation
transmission electron microscopy
silicon
fluence
implantation
2 Citations (Scopus)

Arsenic redistribution after solid phase epitaxial regrowth of shallow pre-amorphized silicon layers

Demenev, E., Giubertoni, D., Gennaro, S., Bersani, M., Hourdakis, E., Nassiopoulou, A. G., Reading, M. A. & Van Den Berg, J. A., 6 Nov 2012, Ion Implantation Technology 2012: Proceedings of the 19th International Conference on Ion Implantation Technology. Pelaz, L., Santos, I., Duffy, R., Torregrosa, F. & Bourdelle, K. (eds.). American Institute of Physics Publising LLC, Vol. 1496. p. 272-275 4 p. (AIP Conference Proceedings; vol. 1496).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

arsenic
solid phases
silicon
atoms
dosage
12 Citations (Scopus)
ion scattering
Secondary ion mass spectrometry
Arsenic
arsenic
secondary ion mass spectrometry
11 Citations (Scopus)

Helium irradiation effects in polycrystalline Si, silica, and single crystal Si

Abrams, K. J., Hinks, J. A., Pawley, C. J., Greaves, G., Van Den Berg, J. A., Eyidi, D., Ward, M. B. & Donnelly, S. E., 15 Apr 2012, In : Journal of Applied Physics. 111, 8, 083527.

Research output: Contribution to journalArticle

ion irradiation
helium
silicon dioxide
irradiation
single crystals
1 Citation (Scopus)

Precipitation of Antimony Implanted into Silicon

Koffel, S., Pichler, P., Reading, M. A., Van Den Berg, J. A., Kheyrandish, H., Hamm, S., Lerch, W., Pakfar, A. & Tavernier, C., 1 Dec 2012, Solid State Topics (General) - 220th ECS Meeting. Sundaram, K., Misra, D., Iwai, H. & Fenton, J. (eds.). 34 ed. The Electrochemical Society, Vol. 41. p. 9-17 9 p. (ECS Transactions; vol. 41, no. 34).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Antimony
Silicon
Rapid thermal annealing
Secondary ion mass spectrometry
Epitaxial growth

The UK MEIS facility: A new future

Barlow, R. J., Bailey, P. & Van Den Berg, J. A., 1 Dec 2012, IPAC 2012: 3rd International Particle Accelerator Conference 2012. Corbett, J., Morris, K., Satogata, T., Eyberger, C., Petit-Jean-Genaz, C. & Schaa, V. (eds.). IEEE, p. 4151-4153 3 p.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Open Access
ion scattering
stations
ion beams
energy
ions

TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM

Barozzi, M., Iacob, E., Van Den Berg, J. A., Reading, M. A., Adelmann, C., Popovici, M., Tielens, H. & Bersani, M., 4 May 2012, In : Surface and Interface Analysis. 45, 1, p. 394-397 4 p.

Research output: Contribution to journalArticle

Silicon
Secondary ion mass spectrometry
secondary ion mass spectrometry
atomic force microscopy
craters
5 Citations (Scopus)

Transmission electron microscopy study of graphite under in situ ion irradiation

Hinks, J. A., Jones, A. N., Theodosiou, A., Van Den Berg, J. A. & Donnelly, S. E., Sep 2012, In : Journal of Physics: Conference Series. 371, 012046.

Research output: Contribution to journalConference article

ion irradiation
gas cooled reactors
graphite
reactors
radiation damage
2011
2 Citations (Scopus)

Characterisation of ultra-shallow disorder profiles and dielectric functions in ion implanted Si

Mohacsi, I., Petrik, P., Fried, M., Lohner, T., Van Den Berg, J. A., Reading, M. A., Giubertoni, D., Barozzi, M. & Parisini, A., 28 Feb 2011, In : Thin Solid Films. 519, 9, p. 2847-2851 5 p.

Research output: Contribution to journalArticle

Spectroscopic ellipsometry
disorders
Ions
ion scattering
ellipsometry
2 Citations (Scopus)

Electrical and structural properties of ultrathin SiON films on Si prepared by plasma nitridation

Hourdakis, E., Nassiopoulou, A. G., Parisini, A., Reading, M. A., Van Den Berg, J. A., Sygellou, L., Ladas, S., Petrik, P., Nutsch, A., Wolf, M. & Roeder, G., Jan 2011, In : Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics. 29, 2, 022201.

Research output: Contribution to journalArticle

Nitridation
Ultrathin films
thick films
Structural properties
Electric properties
47 Citations (Scopus)
Particle accelerators
Microscopes
Ions
Electron microscopes
Irradiation