A bakable UHV, Precision three-axis goniometer

J. A. Van den Berg, D. G. Armour

Research output: Contribution to journalArticlepeer-review

15 Citations (Scopus)


As part of a 2-100 keV, ultra-high vacuum ion impact spectrometer system, a robust target goniometer has been developed with the following characteristics: three independent axes of rotation, stepper motor driven with large angular ranges (240°, 360° and 40°), reproduccibility of angular setting 0.02°, bakable to 250°C, target temperature control and target current monitoring facilities. Eighteen months' operational experience, involving numerous bakeout cycles have proved the reliability of the instrument and its capability of meeting the above specification during prolonged use.

Original languageEnglish
Pages (from-to)99-104
Number of pages6
JournalNuclear Instruments and Methods
Issue number1
Publication statusPublished - 1 Jul 1978
Externally publishedYes


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