A brief review of the technological advancements of phase measuring deflectometry

Yongjia Xu; Feng Gao; Jane Jiang

doi:10.1186/s43074-020-00015-9

A brief review of the technological advancements of phase measuring deflectometry

Yongjia Xu, Feng Gao, Jane Jiang

Research output: Contribution to journal › Review article › peer-review

71 Citations (Scopus)

Abstract

This paper presents a short review for phase measuring deflectometry (PMD). PMD is a phase calculation based technique for three-dimensional (3D) measurement of specular surfaces. PMD can achieve nano-scale form measurement accuracy with the advantages of high dynamic range, non-contact, full field measurement which makes it a competitive method for specular surface measurement. With the development of computer science, display and imaging technology, there has been an advancement in speed for PMD in recent years. This paper discusses PMD focusing on the difference on its system configuration. Measurement principles, progress, advantages and problems are discussed for each category. The challenges and future development of PMD are also discussed.

Original language	English
Article number	14
Number of pages	10
Journal	PhotoniX
Volume	1
DOIs	https://doi.org/10.1186/s43074-020-00015-9
Publication status	Published - 5 Jun 2020

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10.1186/s43074-020-00015-9Licence: CC BY

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title = "A brief review of the technological advancements of phase measuring deflectometry",

abstract = "This paper presents a short review for phase measuring deflectometry (PMD). PMD is a phase calculation based technique for three-dimensional (3D) measurement of specular surfaces. PMD can achieve nano-scale form measurement accuracy with the advantages of high dynamic range, non-contact, full field measurement which makes it a competitive method for specular surface measurement. With the development of computer science, display and imaging technology, there has been an advancement in speed for PMD in recent years. This paper discusses PMD focusing on the difference on its system configuration. Measurement principles, progress, advantages and problems are discussed for each category. The challenges and future development of PMD are also discussed.",

keywords = "Phase measuring deflectometry, 3D measurement, Specular surface, Phase measurement, Fringe analyses",

author = "Yongjia Xu and Feng Gao and Jane Jiang",

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N2 - This paper presents a short review for phase measuring deflectometry (PMD). PMD is a phase calculation based technique for three-dimensional (3D) measurement of specular surfaces. PMD can achieve nano-scale form measurement accuracy with the advantages of high dynamic range, non-contact, full field measurement which makes it a competitive method for specular surface measurement. With the development of computer science, display and imaging technology, there has been an advancement in speed for PMD in recent years. This paper discusses PMD focusing on the difference on its system configuration. Measurement principles, progress, advantages and problems are discussed for each category. The challenges and future development of PMD are also discussed.

AB - This paper presents a short review for phase measuring deflectometry (PMD). PMD is a phase calculation based technique for three-dimensional (3D) measurement of specular surfaces. PMD can achieve nano-scale form measurement accuracy with the advantages of high dynamic range, non-contact, full field measurement which makes it a competitive method for specular surface measurement. With the development of computer science, display and imaging technology, there has been an advancement in speed for PMD in recent years. This paper discusses PMD focusing on the difference on its system configuration. Measurement principles, progress, advantages and problems are discussed for each category. The challenges and future development of PMD are also discussed.

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A brief review of the technological advancements of phase measuring deflectometry

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