A Chip Tuneable Laser Developed for On-Line Micro-Nano Scale Surface Measurements

Jiang Xiangqian, Shuming Yang, Graeme Maxwell, Richard Wyatt, Dave Rogers

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

The demand for accuracy and precision at the micro-nano level is constantly increasing in the manufacture of high added value products. This requires control and measurement of the surface structure since surface properties at such tiny scales are the dominant functional determinant. Many commercial instruments have been used for surface measurements. However, these devices are almost always operated in an off-line environment, and are not suitable for on-line application. This paper presents a new interferometry system consisting of a chip tuneable laser for future on-line micro-nano scale surface measurements. It is simple, compact and robust as most environmental noise and disturbance can be eliminated without any servo control system due to the near common path configuration and the compact construction. The experimental results show that this system has good performance, and there is scope to improve this if the performance of the laser is enhanced.

Original languageEnglish
Article number105901
JournalMeasurement Science and Technology
Volume21
Issue number10
DOIs
Publication statusPublished - 9 Aug 2010

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Surface measurement
Chip
chips
Laser
Lasers
Interferometry
Surface structure
lasers
Surface properties
Control systems
determinants
surface properties
Servo System
interferometry
disturbances
Determinant
Disturbance
Control System
products
configurations

Cite this

Xiangqian, Jiang ; Yang, Shuming ; Maxwell, Graeme ; Wyatt, Richard ; Rogers, Dave. / A Chip Tuneable Laser Developed for On-Line Micro-Nano Scale Surface Measurements. In: Measurement Science and Technology. 2010 ; Vol. 21, No. 10.
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A Chip Tuneable Laser Developed for On-Line Micro-Nano Scale Surface Measurements. / Xiangqian, Jiang; Yang, Shuming; Maxwell, Graeme; Wyatt, Richard; Rogers, Dave.

In: Measurement Science and Technology, Vol. 21, No. 10, 105901, 09.08.2010.

Research output: Contribution to journalArticle

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