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A comparative X-ray photoelectron spectroscopy and medium-energy ion-scattering study of ultra-thin, Hf-based high-k films
L. Sygellou, S. Ladas, M. A. Reading, J. A. Van Den Berg, T. Conard, S. De Gendt
Research output: Contribution to journal › Article › peer-review
11
Citations
(Scopus)