A High Speed Scanning Heterodyne Interferometer for Interferometer for in Process Surface Measurement

F. Gao, X. Jiang, K. Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

A high speed scanning heterodyne optical interferometer for surface measurement is introduced. The interferometer employs a pair of Acousto-Optical Deflectors (AOD) which provides a fixed frequency difference between the reference and measurement arms to implement rapid scanning for surface measurement. There is no mechanical moving part involved in the scanning; therefore the phase noise created by mechanical scanning which restricts its speed has been reduced. The measurement arm and the reference arm are identical which reduces the sensitivity of the interferometer to change of ambient temperature. The experiment has demonstrated the potential of on-line measurement of surface finish in the nanometre range.

LanguageEnglish
Title of host publicationProceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009
Publishereuspen
Pages390-392
Number of pages3
Volume2
ISBN (Electronic)9780955308260
Publication statusPublished - 2009
Event9th International Conference of the European Society for Precision Engineering and Nanotechnology - San Sebastian, Spain
Duration: 2 Jun 20095 Jun 2009
Conference number: 9

Conference

Conference9th International Conference of the European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2009
CountrySpain
CitySan Sebastian
Period2/06/095/06/09

Fingerprint

Surface measurement
Interferometers
interferometers
high speed
Scanning
scanning
Phase noise
deflectors
ambient temperature
sensitivity
Experiments
Temperature

Cite this

Gao, F., Jiang, X., & Wang, K. (2009). A High Speed Scanning Heterodyne Interferometer for Interferometer for in Process Surface Measurement. In Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009 (Vol. 2, pp. 390-392). euspen.
Gao, F. ; Jiang, X. ; Wang, K. / A High Speed Scanning Heterodyne Interferometer for Interferometer for in Process Surface Measurement. Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. Vol. 2 euspen, 2009. pp. 390-392
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Gao, F, Jiang, X & Wang, K 2009, A High Speed Scanning Heterodyne Interferometer for Interferometer for in Process Surface Measurement. in Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. vol. 2, euspen, pp. 390-392, 9th International Conference of the European Society for Precision Engineering and Nanotechnology, San Sebastian, Spain, 2/06/09.

A High Speed Scanning Heterodyne Interferometer for Interferometer for in Process Surface Measurement. / Gao, F.; Jiang, X.; Wang, K.

Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. Vol. 2 euspen, 2009. p. 390-392.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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Gao F, Jiang X, Wang K. A High Speed Scanning Heterodyne Interferometer for Interferometer for in Process Surface Measurement. In Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009. Vol. 2. euspen. 2009. p. 390-392