A hybrid photonics based sensor for surface measurement

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

By integrating photonic devices on a silicon wafer containing etched waveguides it is possible to create a complete optical system-on-chip. Such a device can contain all the elements required for implementing a wide range of interferometry techniques including wavelength scanning and phase shifting. In this paper we introduce a hybrid photonics based sensor for surface metrology applications containing the following 'on-chip' components: tunable laser, phase-shifter, wavelength de-multiplexer, and wavelength encoder. This paper presents the design of the system-on-chip as a miniaturised sensor. Initial experimental results are shown which prove the potential of this device as a viable surface measurement tool.

Original languageEnglish
Pages (from-to)549-552
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume63
Issue number1
DOIs
Publication statusPublished - 2014

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Surface measurement
Photonics
Wavelength
Sensors
Photonic devices
Laser tuning
Phase shifters
Silicon wafers
Interferometry
Optical systems
Waveguides
Scanning
System-on-chip

Cite this

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A hybrid photonics based sensor for surface measurement. / Martin, Haydn; Kumar, Prashant; Jiang, Xiangqian.

In: CIRP Annals - Manufacturing Technology, Vol. 63, No. 1, 2014, p. 549-552.

Research output: Contribution to journalArticle

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