Abstract
By integrating photonic devices on a silicon wafer containing etched waveguides it is possible to create a complete optical system-on-chip. Such a device can contain all the elements required for implementing a wide range of interferometry techniques including wavelength scanning and phase shifting. In this paper we introduce a hybrid photonics based sensor for surface metrology applications containing the following 'on-chip' components: tunable laser, phase-shifter, wavelength de-multiplexer, and wavelength encoder. This paper presents the design of the system-on-chip as a miniaturised sensor. Initial experimental results are shown which prove the potential of this device as a viable surface measurement tool.
Original language | English |
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Pages (from-to) | 549-552 |
Number of pages | 4 |
Journal | CIRP Annals - Manufacturing Technology |
Volume | 63 |
Issue number | 1 |
Early online date | 29 Apr 2014 |
DOIs | |
Publication status | Published - 29 Apr 2014 |
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Prashant Kumar
- Department of Engineering - Research Fellow
- School of Computing and Engineering
- Centre for Precision Technologies - Member
Person: Academic