Engineering & Materials Science
Ion bombardment
100%
Ion beams
88%
Single crystals
72%
Helium
70%
Cleaning
58%
Ions
57%
Ion sources
48%
Mass spectrometry
40%
Argon
35%
Electrons
31%
Annealing
31%
Hot Temperature
30%
Plasmas
28%
Defects
21%
Gases
17%
Physics & Astronomy
ion beams
48%
damage
44%
single crystals
38%
cleaning
30%
ions
29%
bombardment
29%
helium
24%
electron bombardment
19%
energy
18%
holders
17%
mass spectroscopy
15%
assembly
13%
fluence
13%
chambers
12%
argon
12%
trapping
12%
filters
11%
probes
9%
annealing
9%
defects
8%
gases
8%
interactions
6%
Chemistry
Ion Beam
68%
Single Crystalline Solid
44%
Ion Bombardment
40%
Energy
29%
Ion
24%
Holder
19%
Annealing
12%
Mass Spectrometry
10%
Plasma
9%
Probe
9%
Electron Particle
8%