A new approch to study the damage induced by inert gases implantation in silicon

S. Peripolli, M. F. Beaufort, D. Babonneau, S. Rousselet, P. F.P. Fichtner, L. Amaral, E. Oliviero, J. F. Barbot, S. E. Donnelly

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

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