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A new approch to study the damage induced by inert gases implantation in silicon
S. Peripolli, M. F. Beaufort, D. Babonneau, S. Rousselet, P. F.P. Fichtner, L. Amaral, E. Oliviero, J. F. Barbot, S. E. Donnelly
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
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(Scopus)