TY - JOUR
T1 - A novel contact/non-contact hybrid measurement system for surface topography characterization
AU - Lu, Shengfeng
AU - Gao, Yongsheng
AU - Xie, Tiebang
AU - Xie, Feng
AU - Jiang, X. Q.
AU - Li, Zhu
AU - Wang, Fangmin
PY - 2001/10/1
Y1 - 2001/10/1
N2 - A novel surface profile measurement instrument, developed for the characterization of engineering surfaces, is presented. The instrument is of a hybrid type and is capable of contact and non-contact measurement, making it suitable for a wider range of applications. It has an optical displacement sensor and a stylus displacement sensor. For contact measurement, the vertical measurement range and resolution of the instrument are 1 mm and 10 nm, respectively. For non-contact measurement, they are 500 μm and 3 nm, respectively. The instrument has been successfully used for several forensic applications, demonstrating its unique flexibility and high reliability as a novel surface topography instrument.
AB - A novel surface profile measurement instrument, developed for the characterization of engineering surfaces, is presented. The instrument is of a hybrid type and is capable of contact and non-contact measurement, making it suitable for a wider range of applications. It has an optical displacement sensor and a stylus displacement sensor. For contact measurement, the vertical measurement range and resolution of the instrument are 1 mm and 10 nm, respectively. For non-contact measurement, they are 500 μm and 3 nm, respectively. The instrument has been successfully used for several forensic applications, demonstrating its unique flexibility and high reliability as a novel surface topography instrument.
KW - Contact/non-contact measurement
KW - Surface characterization
KW - Surface topography
UR - http://www.scopus.com/inward/record.url?scp=0035479486&partnerID=8YFLogxK
U2 - 10.1016/S0890-6955(01)00064-5
DO - 10.1016/S0890-6955(01)00064-5
M3 - Article
AN - SCOPUS:0035479486
VL - 41
SP - 2001
EP - 2009
JO - International Journal of Machine Tools and Manufacture
JF - International Journal of Machine Tools and Manufacture
SN - 0890-6955
IS - 13-14
ER -