A novel contact/non-contact hybrid measurement system for surface topography characterization

Shengfeng Lu, Yongsheng Gao, Tiebang Xie, Feng Xie, X. Q. Jiang, Zhu Li, Fangmin Wang

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

A novel surface profile measurement instrument, developed for the characterization of engineering surfaces, is presented. The instrument is of a hybrid type and is capable of contact and non-contact measurement, making it suitable for a wider range of applications. It has an optical displacement sensor and a stylus displacement sensor. For contact measurement, the vertical measurement range and resolution of the instrument are 1 mm and 10 nm, respectively. For non-contact measurement, they are 500 μm and 3 nm, respectively. The instrument has been successfully used for several forensic applications, demonstrating its unique flexibility and high reliability as a novel surface topography instrument.

Original languageEnglish
Pages (from-to)2001-2009
Number of pages9
JournalInternational Journal of Machine Tools and Manufacture
Volume41
Issue number13-14
Early online date31 Aug 2001
DOIs
Publication statusPublished - 1 Oct 2001
Externally publishedYes

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Surface topography
Surface measurement
Sensors

Cite this

Lu, Shengfeng ; Gao, Yongsheng ; Xie, Tiebang ; Xie, Feng ; Jiang, X. Q. ; Li, Zhu ; Wang, Fangmin. / A novel contact/non-contact hybrid measurement system for surface topography characterization. In: International Journal of Machine Tools and Manufacture. 2001 ; Vol. 41, No. 13-14. pp. 2001-2009.
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A novel contact/non-contact hybrid measurement system for surface topography characterization. / Lu, Shengfeng; Gao, Yongsheng; Xie, Tiebang; Xie, Feng; Jiang, X. Q.; Li, Zhu; Wang, Fangmin.

In: International Journal of Machine Tools and Manufacture, Vol. 41, No. 13-14, 01.10.2001, p. 2001-2009.

Research output: Contribution to journalArticle

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AU - Lu, Shengfeng

AU - Gao, Yongsheng

AU - Xie, Tiebang

AU - Xie, Feng

AU - Jiang, X. Q.

AU - Li, Zhu

AU - Wang, Fangmin

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