A novel contact/non-contact hybrid measurement system for surface topography characterization

Shengfeng Lu, Yongsheng Gao, Tiebang Xie, Feng Xie, X. Q. Jiang, Zhu Li, Fangmin Wang

Research output: Contribution to journalArticle

10 Citations (Scopus)

Abstract

A novel surface profile measurement instrument, developed for the characterization of engineering surfaces, is presented. The instrument is of a hybrid type and is capable of contact and non-contact measurement, making it suitable for a wider range of applications. It has an optical displacement sensor and a stylus displacement sensor. For contact measurement, the vertical measurement range and resolution of the instrument are 1 mm and 10 nm, respectively. For non-contact measurement, they are 500 μm and 3 nm, respectively. The instrument has been successfully used for several forensic applications, demonstrating its unique flexibility and high reliability as a novel surface topography instrument.

Original languageEnglish
Pages (from-to)2001-2009
Number of pages9
JournalInternational Journal of Machine Tools and Manufacture
Volume41
Issue number13-14
Early online date31 Aug 2001
DOIs
Publication statusPublished - 1 Oct 2001
Externally publishedYes

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