A novel contact/non-contact hybrid measurement system for surface topography characterization

Shengfeng Lu; Yongsheng Gao; Tiebang Xie; Feng Xie; X. Q. Jiang; Zhu Li; Fangmin Wang

doi:10.1016/S0890-6955(01)00064-5

A novel contact/non-contact hybrid measurement system for surface topography characterization

Shengfeng Lu, Yongsheng Gao, Tiebang Xie, Feng Xie, X. Q. Jiang, Zhu Li, Fangmin Wang

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

A novel surface profile measurement instrument, developed for the characterization of engineering surfaces, is presented. The instrument is of a hybrid type and is capable of contact and non-contact measurement, making it suitable for a wider range of applications. It has an optical displacement sensor and a stylus displacement sensor. For contact measurement, the vertical measurement range and resolution of the instrument are 1 mm and 10 nm, respectively. For non-contact measurement, they are 500 μm and 3 nm, respectively. The instrument has been successfully used for several forensic applications, demonstrating its unique flexibility and high reliability as a novel surface topography instrument.

Original language	English
Pages (from-to)	2001-2009
Number of pages	9
Journal	International Journal of Machine Tools and Manufacture
Volume	41
Issue number	13-14
Early online date	31 Aug 2001
DOIs	https://doi.org/10.1016/S0890-6955(01)00064-5
Publication status	Published - 1 Oct 2001
Externally published	Yes

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title = "A novel contact/non-contact hybrid measurement system for surface topography characterization",

abstract = "A novel surface profile measurement instrument, developed for the characterization of engineering surfaces, is presented. The instrument is of a hybrid type and is capable of contact and non-contact measurement, making it suitable for a wider range of applications. It has an optical displacement sensor and a stylus displacement sensor. For contact measurement, the vertical measurement range and resolution of the instrument are 1 mm and 10 nm, respectively. For non-contact measurement, they are 500 μm and 3 nm, respectively. The instrument has been successfully used for several forensic applications, demonstrating its unique flexibility and high reliability as a novel surface topography instrument.",

keywords = "Contact/non-contact measurement, Surface characterization, Surface topography",

author = "Shengfeng Lu and Yongsheng Gao and Tiebang Xie and Feng Xie and Jiang, \{X. Q.\} and Zhu Li and Fangmin Wang",

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T1 - A novel contact/non-contact hybrid measurement system for surface topography characterization

AU - Lu, Shengfeng

AU - Gao, Yongsheng

AU - Xie, Tiebang

AU - Xie, Feng

AU - Jiang, X. Q.

AU - Li, Zhu

AU - Wang, Fangmin

PY - 2001/10/1

Y1 - 2001/10/1

N2 - A novel surface profile measurement instrument, developed for the characterization of engineering surfaces, is presented. The instrument is of a hybrid type and is capable of contact and non-contact measurement, making it suitable for a wider range of applications. It has an optical displacement sensor and a stylus displacement sensor. For contact measurement, the vertical measurement range and resolution of the instrument are 1 mm and 10 nm, respectively. For non-contact measurement, they are 500 μm and 3 nm, respectively. The instrument has been successfully used for several forensic applications, demonstrating its unique flexibility and high reliability as a novel surface topography instrument.

AB - A novel surface profile measurement instrument, developed for the characterization of engineering surfaces, is presented. The instrument is of a hybrid type and is capable of contact and non-contact measurement, making it suitable for a wider range of applications. It has an optical displacement sensor and a stylus displacement sensor. For contact measurement, the vertical measurement range and resolution of the instrument are 1 mm and 10 nm, respectively. For non-contact measurement, they are 500 μm and 3 nm, respectively. The instrument has been successfully used for several forensic applications, demonstrating its unique flexibility and high reliability as a novel surface topography instrument.

KW - Contact/non-contact measurement

KW - Surface characterization

KW - Surface topography

UR - https://www.scopus.com/pages/publications/0035479486

U2 - 10.1016/S0890-6955(01)00064-5

DO - 10.1016/S0890-6955(01)00064-5

M3 - Article

AN - SCOPUS:0035479486

SN - 0890-6955

VL - 41

SP - 2001

EP - 2009

JO - International Journal of Machine Tools and Manufacture

JF - International Journal of Machine Tools and Manufacture

IS - 13-14

ER -

A novel contact/non-contact hybrid measurement system for surface topography characterization

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