A novel multi-function tribological probe microscope for mapping surface properties

Research output: Contribution to journalArticle

30 Citations (Scopus)

Abstract

A novel multi-function tribological probe microscope (TPM) has been developed for characterizing surface properties at the micro and nanometre level. The TPM provides four function measurements in a single scan arrangement: surface topography, friction, Young's modulus and hardness of a surface. The measurement is based on point-by-point scanning so that the four measured functions can be correlated in space and in time. It targets an area that is of growing importance to a wide range of technologies where function-orientated surfaces/coatings are in demand. The essential part of the TPM is a force-controlled scanning probe, which has two capacitive sensors. One sensor measures the surface topography and the deformation under a required loading force, and the other measures the frictional force between the probe tip and the surface being scanned. The contact force at the tip is controlled by a magnet/coil force actuator, which applies a constant force in a range of 0.01-30 mN. The topography measurement range is 15 μm with a resolution of 0.1 nm. The scanning area of 100 × 100 μm2 is closed loop controlled with an accuracy of 1 nm. Details of the design, testing and calibration of the TPM are presented, as well as applications of the TPM in mapping surface properties of glass, conductive polymer and some engineered surfaces.

LanguageEnglish
Pages91-102
Number of pages12
JournalMeasurement Science and Technology
Volume15
Issue number1
Early online date4 Nov 2003
DOIs
Publication statusPublished - Jan 2004
Externally publishedYes

Fingerprint

Microscope
surface properties
Surface properties
Microscopes
Probe
microscopes
probes
Scanning
Surface Topography
topography
Surface topography
scanning
Range of data
magnet coils
Capacitive sensors
Sensor
Contact Force
sensors
Young's Modulus
rangefinding

Cite this

@article{8c4a4b2a3f0c48b9bdfd1b59cb8c16df,
title = "A novel multi-function tribological probe microscope for mapping surface properties",
abstract = "A novel multi-function tribological probe microscope (TPM) has been developed for characterizing surface properties at the micro and nanometre level. The TPM provides four function measurements in a single scan arrangement: surface topography, friction, Young's modulus and hardness of a surface. The measurement is based on point-by-point scanning so that the four measured functions can be correlated in space and in time. It targets an area that is of growing importance to a wide range of technologies where function-orientated surfaces/coatings are in demand. The essential part of the TPM is a force-controlled scanning probe, which has two capacitive sensors. One sensor measures the surface topography and the deformation under a required loading force, and the other measures the frictional force between the probe tip and the surface being scanned. The contact force at the tip is controlled by a magnet/coil force actuator, which applies a constant force in a range of 0.01-30 mN. The topography measurement range is 15 μm with a resolution of 0.1 nm. The scanning area of 100 × 100 μm2 is closed loop controlled with an accuracy of 1 nm. Details of the design, testing and calibration of the TPM are presented, as well as applications of the TPM in mapping surface properties of glass, conductive polymer and some engineered surfaces.",
keywords = "Mapping surface properties, Nanoindentation, Nanotribology, Scanning probe microscope, Surface characterization",
author = "X. Liu and F. Gao",
year = "2004",
month = "1",
doi = "10.1088/0957-0233/15/1/013",
language = "English",
volume = "15",
pages = "91--102",
journal = "Measurement Science and Technology",
issn = "0957-0233",
publisher = "IOP Publishing",
number = "1",

}

A novel multi-function tribological probe microscope for mapping surface properties. / Liu, X.; Gao, F.

In: Measurement Science and Technology, Vol. 15, No. 1, 01.2004, p. 91-102.

Research output: Contribution to journalArticle

TY - JOUR

T1 - A novel multi-function tribological probe microscope for mapping surface properties

AU - Liu, X.

AU - Gao, F.

PY - 2004/1

Y1 - 2004/1

N2 - A novel multi-function tribological probe microscope (TPM) has been developed for characterizing surface properties at the micro and nanometre level. The TPM provides four function measurements in a single scan arrangement: surface topography, friction, Young's modulus and hardness of a surface. The measurement is based on point-by-point scanning so that the four measured functions can be correlated in space and in time. It targets an area that is of growing importance to a wide range of technologies where function-orientated surfaces/coatings are in demand. The essential part of the TPM is a force-controlled scanning probe, which has two capacitive sensors. One sensor measures the surface topography and the deformation under a required loading force, and the other measures the frictional force between the probe tip and the surface being scanned. The contact force at the tip is controlled by a magnet/coil force actuator, which applies a constant force in a range of 0.01-30 mN. The topography measurement range is 15 μm with a resolution of 0.1 nm. The scanning area of 100 × 100 μm2 is closed loop controlled with an accuracy of 1 nm. Details of the design, testing and calibration of the TPM are presented, as well as applications of the TPM in mapping surface properties of glass, conductive polymer and some engineered surfaces.

AB - A novel multi-function tribological probe microscope (TPM) has been developed for characterizing surface properties at the micro and nanometre level. The TPM provides four function measurements in a single scan arrangement: surface topography, friction, Young's modulus and hardness of a surface. The measurement is based on point-by-point scanning so that the four measured functions can be correlated in space and in time. It targets an area that is of growing importance to a wide range of technologies where function-orientated surfaces/coatings are in demand. The essential part of the TPM is a force-controlled scanning probe, which has two capacitive sensors. One sensor measures the surface topography and the deformation under a required loading force, and the other measures the frictional force between the probe tip and the surface being scanned. The contact force at the tip is controlled by a magnet/coil force actuator, which applies a constant force in a range of 0.01-30 mN. The topography measurement range is 15 μm with a resolution of 0.1 nm. The scanning area of 100 × 100 μm2 is closed loop controlled with an accuracy of 1 nm. Details of the design, testing and calibration of the TPM are presented, as well as applications of the TPM in mapping surface properties of glass, conductive polymer and some engineered surfaces.

KW - Mapping surface properties

KW - Nanoindentation

KW - Nanotribology

KW - Scanning probe microscope

KW - Surface characterization

UR - http://www.scopus.com/inward/record.url?scp=0742304797&partnerID=8YFLogxK

U2 - 10.1088/0957-0233/15/1/013

DO - 10.1088/0957-0233/15/1/013

M3 - Article

VL - 15

SP - 91

EP - 102

JO - Measurement Science and Technology

T2 - Measurement Science and Technology

JF - Measurement Science and Technology

SN - 0957-0233

IS - 1

ER -