Abstract
Nowadays, there are lack of definitive international standards, surface parameters and techniques for the characterisation of the surface generation of optical microstructures with the articulation to their quality specifications in practical applications. This paper presents a study of factors affecting the surface generation in FTS machining of optical microstructures. The surface quality and defects of the machined surfaces are examined by a non-contact interferometric surface profiler. Surface features and patterns are analysed based on power spectrum analysis and are correlated with the surface quality of the optical microstructures. The results form the basis for the development of the pattern and feature analysis algorithms for the characterisation of surface generation in FTS machining of optical microstructures.
| Original language | English |
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| Title of host publication | Proceedings of the 21st Annual ASPE Meeting |
| Subtitle of host publication | ASPE 2006 |
| Publisher | American Society for Precision Engineering, ASPE |
| Number of pages | 4 |
| ISBN (Print) | 1887706410, 9781887706414 |
| Publication status | Published - Oct 2006 |
| Event | 21st Annual Meeting of the American Society for Precision Engineering - Monterey, United States Duration: 15 Oct 2006 → 20 Oct 2006 Conference number: 21 |
Conference
| Conference | 21st Annual Meeting of the American Society for Precision Engineering |
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| Abbreviated title | ASPE 2006 |
| Country/Territory | United States |
| City | Monterey |
| Period | 15/10/06 → 20/10/06 |