A Surface Topography Acquisiton Method for Double-Sided Near-Right-Angle Structured Surfaces Based on Dual-Probe Wavelength Scanning Interferometry

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7 Citations (Scopus)

Abstract

This paper proposes an approach to measure double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry (DPWSI). The principle and mathematical model is discussed and the measurement system is calibrated with a combination of standard step-height samples for both probes vertical calibrations and a specially designed calibration artefact for building up the space coordinate relationship of the dual-probe measurement system. The topography of the specially designed artefact is acquired by combining the measurement results with white light scanning interferometer (WLSI) and scanning electron microscope (SEM) for reference. The relative location of the two probes is then determined with 3D registration algorithm. Experimental validation of the approach is provided and the results show that the method is able to measure double-sided near-right-angle structured surfaces with nanometer vertical resolution and micrometer lateral resolution.
Original languageEnglish
Pages (from-to)24148-24156
Number of pages9
JournalOptics Express
Volume25
Issue number20
DOIs
Publication statusPublished - 22 Sep 2017

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