A Surface Topography Acquisiton Method for Double-Sided Near-Right-Angle Structured Surfaces Based on Dual-Probe Wavelength Scanning Interferometry

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

This paper proposes an approach to measure double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry (DPWSI). The principle and mathematical model is discussed and the measurement system is calibrated with a combination of standard step-height samples for both probes vertical calibrations and a specially designed calibration artefact for building up the space coordinate relationship of the dual-probe measurement system. The topography of the specially designed artefact is acquired by combining the measurement results with white light scanning interferometer (WLSI) and scanning electron microscope (SEM) for reference. The relative location of the two probes is then determined with 3D registration algorithm. Experimental validation of the approach is provided and the results show that the method is able to measure double-sided near-right-angle structured surfaces with nanometer vertical resolution and micrometer lateral resolution.
LanguageEnglish
Pages24148-24156
Number of pages9
JournalOptics Express
Volume25
Issue number20
DOIs
Publication statusPublished - 22 Sep 2017

Fingerprint

topography
interferometry
scanning
probes
wavelengths
artifacts
micrometers
mathematical models
interferometers
electron microscopes

Cite this

@article{cca14a5f7223425eb8924d3e156045f1,
title = "A Surface Topography Acquisiton Method for Double-Sided Near-Right-Angle Structured Surfaces Based on Dual-Probe Wavelength Scanning Interferometry",
abstract = "This paper proposes an approach to measure double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry (DPWSI). The principle and mathematical model is discussed and the measurement system is calibrated with a combination of standard step-height samples for both probes vertical calibrations and a specially designed calibration artefact for building up the space coordinate relationship of the dual-probe measurement system. The topography of the specially designed artefact is acquired by combining the measurement results with white light scanning interferometer (WLSI) and scanning electron microscope (SEM) for reference. The relative location of the two probes is then determined with 3D registration algorithm. Experimental validation of the approach is provided and the results show that the method is able to measure double-sided near-right-angle structured surfaces with nanometer vertical resolution and micrometer lateral resolution.",
author = "Tao Zhang and Feng Gao and Xiangqian Jiang",
year = "2017",
month = "9",
day = "22",
doi = "10.1364/OE.25.024148",
language = "English",
volume = "25",
pages = "24148--24156",
journal = "Optics Express",
issn = "1094-4087",
publisher = "The Optical Society",
number = "20",

}

TY - JOUR

T1 - A Surface Topography Acquisiton Method for Double-Sided Near-Right-Angle Structured Surfaces Based on Dual-Probe Wavelength Scanning Interferometry

AU - Zhang, Tao

AU - Gao, Feng

AU - Jiang, Xiangqian

PY - 2017/9/22

Y1 - 2017/9/22

N2 - This paper proposes an approach to measure double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry (DPWSI). The principle and mathematical model is discussed and the measurement system is calibrated with a combination of standard step-height samples for both probes vertical calibrations and a specially designed calibration artefact for building up the space coordinate relationship of the dual-probe measurement system. The topography of the specially designed artefact is acquired by combining the measurement results with white light scanning interferometer (WLSI) and scanning electron microscope (SEM) for reference. The relative location of the two probes is then determined with 3D registration algorithm. Experimental validation of the approach is provided and the results show that the method is able to measure double-sided near-right-angle structured surfaces with nanometer vertical resolution and micrometer lateral resolution.

AB - This paper proposes an approach to measure double-sided near-right-angle structured surfaces based on dual-probe wavelength scanning interferometry (DPWSI). The principle and mathematical model is discussed and the measurement system is calibrated with a combination of standard step-height samples for both probes vertical calibrations and a specially designed calibration artefact for building up the space coordinate relationship of the dual-probe measurement system. The topography of the specially designed artefact is acquired by combining the measurement results with white light scanning interferometer (WLSI) and scanning electron microscope (SEM) for reference. The relative location of the two probes is then determined with 3D registration algorithm. Experimental validation of the approach is provided and the results show that the method is able to measure double-sided near-right-angle structured surfaces with nanometer vertical resolution and micrometer lateral resolution.

UR - https://www.osapublishing.org/oe/home.cfm

U2 - 10.1364/OE.25.024148

DO - 10.1364/OE.25.024148

M3 - Article

VL - 25

SP - 24148

EP - 24156

JO - Optics Express

T2 - Optics Express

JF - Optics Express

SN - 1094-4087

IS - 20

ER -