A TEM and EDX study of cavities formed in tin by xenon ion implantation

D. R G Mitchell, S. E. Donnelly, S. R. Glanvill, P. R. Miller, C. J. Rossouw

Research output: Contribution to journalArticle

4 Citations (Scopus)

Abstract

A detailed transmission electron microscopy and EDX study has been carried out on cavities formed in tin by xenon ion implantation. Computer simulation of dark field images has identified thickness fringe contrast due to pyramidal {112} faceting on the otherwise {001} surfaces. Quantitative EDX measurements have shown that all the detectable xenon is associated with the cavities as a consequence of the high homologous implantation temperature, and that the larger of these are considerably underpressurized with respect to equilibrium pressure. These cavities have been shown to shrink when annealed, due to thermal emission of vacancies.

Original languageEnglish
Pages (from-to)160-169
Number of pages10
JournalNuclear Inst. and Methods in Physics Research, B
Volume52
Issue number2
DOIs
Publication statusPublished - 1 Dec 1990
Externally publishedYes

Fingerprint

Xenon
Tin
Ion implantation
xenon
ion implantation
Energy dispersive spectroscopy
tin
Transmission electron microscopy
transmission electron microscopy
cavities
Vacancies
thermal emission
implantation
Computer simulation
computerized simulation
Temperature
temperature
Hot Temperature

Cite this

Mitchell, D. R G ; Donnelly, S. E. ; Glanvill, S. R. ; Miller, P. R. ; Rossouw, C. J. / A TEM and EDX study of cavities formed in tin by xenon ion implantation. In: Nuclear Inst. and Methods in Physics Research, B. 1990 ; Vol. 52, No. 2. pp. 160-169.
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A TEM and EDX study of cavities formed in tin by xenon ion implantation. / Mitchell, D. R G; Donnelly, S. E.; Glanvill, S. R.; Miller, P. R.; Rossouw, C. J.

In: Nuclear Inst. and Methods in Physics Research, B, Vol. 52, No. 2, 01.12.1990, p. 160-169.

Research output: Contribution to journalArticle

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