A TEM and EDX study of cavities formed in tin by xenon ion implantation

D. R G Mitchell; S. E. Donnelly; S. R. Glanvill; P. R. Miller; C. J. Rossouw

doi:10.1016/0168-583X(90)90584-H

A TEM and EDX study of cavities formed in tin by xenon ion implantation

D. R G Mitchell, S. E. Donnelly, S. R. Glanvill, P. R. Miller, C. J. Rossouw

Research output: Contribution to journal › Article › peer-review

5 Citations (Scopus)

Abstract

A detailed transmission electron microscopy and EDX study has been carried out on cavities formed in tin by xenon ion implantation. Computer simulation of dark field images has identified thickness fringe contrast due to pyramidal {112} faceting on the otherwise {001} surfaces. Quantitative EDX measurements have shown that all the detectable xenon is associated with the cavities as a consequence of the high homologous implantation temperature, and that the larger of these are considerably underpressurized with respect to equilibrium pressure. These cavities have been shown to shrink when annealed, due to thermal emission of vacancies.

Original language	English
Pages (from-to)	160-169
Number of pages	10
Journal	Nuclear Inst. and Methods in Physics Research, B
Volume	52
Issue number	2
DOIs	https://doi.org/10.1016/0168-583X(90)90584-H
Publication status	Published - 1 Dec 1990
Externally published	Yes

Access to Document

10.1016/0168-583X(90)90584-HLicence: Unspecified

Cite this

@article{e157998451c840b492f49675b347b50a,

title = "A TEM and EDX study of cavities formed in tin by xenon ion implantation",

abstract = "A detailed transmission electron microscopy and EDX study has been carried out on cavities formed in tin by xenon ion implantation. Computer simulation of dark field images has identified thickness fringe contrast due to pyramidal {112} faceting on the otherwise {001} surfaces. Quantitative EDX measurements have shown that all the detectable xenon is associated with the cavities as a consequence of the high homologous implantation temperature, and that the larger of these are considerably underpressurized with respect to equilibrium pressure. These cavities have been shown to shrink when annealed, due to thermal emission of vacancies.",

author = "Mitchell, {D. R G} and Donnelly, {S. E.} and Glanvill, {S. R.} and Miller, {P. R.} and Rossouw, {C. J.}",

year = "1990",

month = dec,

day = "1",

doi = "10.1016/0168-583X(90)90584-H",

language = "English",

volume = "52",

pages = "160--169",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

issn = "0168-583X",

publisher = "Elsevier",

number = "2",

}

TY - JOUR

T1 - A TEM and EDX study of cavities formed in tin by xenon ion implantation

AU - Mitchell, D. R G

AU - Donnelly, S. E.

AU - Glanvill, S. R.

AU - Miller, P. R.

AU - Rossouw, C. J.

PY - 1990/12/1

Y1 - 1990/12/1

N2 - A detailed transmission electron microscopy and EDX study has been carried out on cavities formed in tin by xenon ion implantation. Computer simulation of dark field images has identified thickness fringe contrast due to pyramidal {112} faceting on the otherwise {001} surfaces. Quantitative EDX measurements have shown that all the detectable xenon is associated with the cavities as a consequence of the high homologous implantation temperature, and that the larger of these are considerably underpressurized with respect to equilibrium pressure. These cavities have been shown to shrink when annealed, due to thermal emission of vacancies.

AB - A detailed transmission electron microscopy and EDX study has been carried out on cavities formed in tin by xenon ion implantation. Computer simulation of dark field images has identified thickness fringe contrast due to pyramidal {112} faceting on the otherwise {001} surfaces. Quantitative EDX measurements have shown that all the detectable xenon is associated with the cavities as a consequence of the high homologous implantation temperature, and that the larger of these are considerably underpressurized with respect to equilibrium pressure. These cavities have been shown to shrink when annealed, due to thermal emission of vacancies.

UR - http://www.scopus.com/inward/record.url?scp=33845209195&partnerID=8YFLogxK

U2 - 10.1016/0168-583X(90)90584-H

DO - 10.1016/0168-583X(90)90584-H

M3 - Article

AN - SCOPUS:33845209195

VL - 52

SP - 160

EP - 169

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

SN - 0168-583X

IS - 2

ER -

A TEM and EDX study of cavities formed in tin by xenon ion implantation

Abstract

Access to Document

Other files and links

Fingerprint

Cite this