@article{5f776cc7a75c464bb612dd182f196d91,
title = "A Whale Optimization Algorithm-Based Data Fitting Method to Determine the Parameters of Films Measured by Spectroscopic Ellipsometry",
abstract = "A data-fitting method based on the whale optimization algorithm (WOA) is proposed to determine the thickness and refractive index of films measured by spectroscopic ellipsometry (SE). To demonstrate this method, tin oxide (SnO2) films with transparent wavelength coverage (400–800 nm) are evaluated. The comparative analysis indicates that Psi and Delta parameter curves based on WOA fitting align more closely with those obtained through experiments. Furthermore, the thickness and refractive index of films obtained by WOA are in nearly agreement with the results from the well-known Levenberg–Marquardt (LM) algorithm. This validation confirms that it has great potential in the determination of film parameters in ellipsometry data fitting.",
keywords = "Spectroscopic ellipsometry, whale optimization algorithm (WOA), Thickness, Refractive index, Tin oxides, tin oxide, spectroscopic ellipsometry, thickness, whale optimization algorithm, refractive index",
author = "Liyuan Ma and Xipeng Xu and Changcai Cui and Mai Gao and Tukun Li and Shan Lou and Paul Scott and Jane Jiang and Wenhan Zeng",
note = "Funding Information: This research was funded by the National Nature Science Foundation of China, grant number 52275531, and the China Scholarship Council, grant number 202308350011. Funding Information: The authors are grateful for the financial support of the China Scholarship Council, and the authors from the University of Huddersfield gratefully acknowledge the UK\u2019s Engineering and Physical Sciences Research Council (EPSRC) funding from the Future Metrology Hub (EP/P006930/1). Publisher Copyright: {\textcopyright} 2025 by the authors.",
year = "2025",
month = jan,
day = "11",
doi = "10.3390/photonics12010060",
language = "English",
volume = "12",
journal = "Photonics",
issn = "2304-6732",
publisher = "MDPI AG",
number = "1",
}