Ablation of Submicrometer Holes Using an Extreme-Ultraviolet Laser

Andrew K. Rossall, Valentin Aslanyan, Greg J. Tallents, Ilya Kuznetsov, Jorge J. Rocca, Carmen S. Menoni

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

Simulations and experiments are used to study extreme-ultraviolet (EUV) laser drilling of submicrometer holes. The ablation process is studied with a 2D Eulerian hydrodynamic code that includes bound-free absorption processes relevant to the interaction of EUV lasers with a solid material. Good agreement is observed between the simulated and measured ablated depths for on-target irradiances of up to 1×1010 W cm-2. An increase in the irradiance to 1×1012 W cm-2 is predicted to ablate material to a depth of 3.8 μm from a single pulse with a hole diameter 3 to 4 times larger than the focal spot size. The model allows for the simulation of the interaction of a laser pulse with the crater created by a previous shot. Multiple-pulse lower-fluence irradiation configurations under optimized focusing conditions, i.e., approaching the diffraction limit, are shown to be advantageous for applications requiring mesoscale [(100 nm)-(1 μm)] features and a high level of control over the ablation profile.

Original languageEnglish
Article number064013
JournalPhysical Review Applied
Volume3
Issue number6
DOIs
Publication statusPublished - 19 Jun 2015
Externally publishedYes

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ultraviolet lasers
ablation
irradiance
pulses
laser drilling
craters
shot
fluence
simulation
hydrodynamics
interactions
irradiation
profiles
configurations
diffraction
lasers

Cite this

Rossall, A. K., Aslanyan, V., Tallents, G. J., Kuznetsov, I., Rocca, J. J., & Menoni, C. S. (2015). Ablation of Submicrometer Holes Using an Extreme-Ultraviolet Laser. Physical Review Applied, 3(6), [064013]. https://doi.org/10.1103/PhysRevApplied.3.064013
Rossall, Andrew K. ; Aslanyan, Valentin ; Tallents, Greg J. ; Kuznetsov, Ilya ; Rocca, Jorge J. ; Menoni, Carmen S. / Ablation of Submicrometer Holes Using an Extreme-Ultraviolet Laser. In: Physical Review Applied. 2015 ; Vol. 3, No. 6.
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Rossall, AK, Aslanyan, V, Tallents, GJ, Kuznetsov, I, Rocca, JJ & Menoni, CS 2015, 'Ablation of Submicrometer Holes Using an Extreme-Ultraviolet Laser', Physical Review Applied, vol. 3, no. 6, 064013. https://doi.org/10.1103/PhysRevApplied.3.064013

Ablation of Submicrometer Holes Using an Extreme-Ultraviolet Laser. / Rossall, Andrew K.; Aslanyan, Valentin; Tallents, Greg J.; Kuznetsov, Ilya; Rocca, Jorge J.; Menoni, Carmen S.

In: Physical Review Applied, Vol. 3, No. 6, 064013, 19.06.2015.

Research output: Contribution to journalArticle

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