Absolute height measurement of specular surfaces with modified active fringe reflection photogrammetry

Hongyu Ren, Xiangqian Jiang, Feng Gao, Zhonghua Zhang

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Citations (Scopus)

Abstract

Deflectometric methods have been studied for more than a decade for slope measurement of specular freeform surfaces through utilization of the deformation of a sample pattern after reflection from a tested sample surface. Usually, these approaches require two-directional fringe patterns to be projected on a LCD screen or ground glass and require slope integration, which leads to some complexity for the whole measuring process. This paper proposes a new mathematical measurement model for measuring topography information of freeform specular surfaces, which integrates a virtual reference specular surface into the method of active fringe reflection photogrammetry and presents a straight-forward relation between height of the tested surface and phase signals. This method only requires one direction of horizontal or vertical sinusoidal fringe patterns to be projected from a LCD screen, resulting in a significant reduction in capture time over established methods. Assuming the whole system has been precalibrated during the measurement process, the fringe patterns are captured separately via the virtual reference and detected freeform surfaces by a CCD camera. The reference phase can be solved according to the spatial geometric relation between the LCD screen and the CCD camera. The captured phases can be unwrapped with a heterodyne technique and optimum frequency selection method. Based on this calculated unwrapped-phase and that proposed mathematical model, absolute height of the inspected surface can be computed. Simulated and experimental results show that this methodology can conveniently calculate topography information for freeform and structured specular surfaces without integration and reconstruction processes.

Original languageEnglish
Title of host publicationInterferometry XVII
Subtitle of host publicationAdvanced Applications
EditorsCosme Furlong, Christophe Gorecki, Peter J. de Groot, Erik L. Novak
PublisherSPIE
Number of pages8
Volume9204
ISBN (Print)9781628412314
DOIs
Publication statusPublished - 18 Aug 2014
EventSPIE Optical Engineering + Applications - San Diego, United States
Duration: 17 Aug 201421 Aug 2014

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
PublisherSPIE
Volume9204
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X

Conference

ConferenceSPIE Optical Engineering + Applications
Country/TerritoryUnited States
CitySan Diego
Period17/08/1421/08/14

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