Accelerated Surface Measurement Using Wavelength Scanning Interferometer with Compensation of Environmental Noise

Research output: Contribution to journalConference article

7 Citations (Scopus)

Abstract

The optical interferometry systems are widely used for surface metrology. However, the environmental noise and the data analysis approach can limit the measurement performance during in- process inspection. This paper introduces a wavelength scanning interferometer (WSI) for micro and nano-scale areal surface measurement. The WSI can measure large discontinuous surface profiles without phase ambiguity problems. The proposed WSI is immune to environmental noise using an active servo control system that serves as a phase compensating mechanism. Furthermore, a parallel CUDA programming model is presented as a solution to accelerate the computing analysis. The presented system can be used for on-line or in-process measurement on the shop floor.

LanguageEnglish
Pages70-76
Number of pages7
JournalProcedia CIRP
Volume10
DOIs
Publication statusPublished - 1 Jan 2013

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Surface measurement
Interferometers
Scanning
Wavelength
Parallel programming
Interferometry
Inspection
Control systems
Compensation and Redress

Cite this

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title = "Accelerated Surface Measurement Using Wavelength Scanning Interferometer with Compensation of Environmental Noise",
abstract = "The optical interferometry systems are widely used for surface metrology. However, the environmental noise and the data analysis approach can limit the measurement performance during in- process inspection. This paper introduces a wavelength scanning interferometer (WSI) for micro and nano-scale areal surface measurement. The WSI can measure large discontinuous surface profiles without phase ambiguity problems. The proposed WSI is immune to environmental noise using an active servo control system that serves as a phase compensating mechanism. Furthermore, a parallel CUDA programming model is presented as a solution to accelerate the computing analysis. The presented system can be used for on-line or in-process measurement on the shop floor.",
keywords = "Computing Acceleration, CUDA, Parallel Programming, Stablisation, Vibration Compensation, Wavelength Scanning Interferometry",
author = "H. Muhamedsalih and X. Jiang and F. Gao",
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AU - Muhamedsalih, H.

AU - Jiang, X.

AU - Gao, F.

PY - 2013/1/1

Y1 - 2013/1/1

N2 - The optical interferometry systems are widely used for surface metrology. However, the environmental noise and the data analysis approach can limit the measurement performance during in- process inspection. This paper introduces a wavelength scanning interferometer (WSI) for micro and nano-scale areal surface measurement. The WSI can measure large discontinuous surface profiles without phase ambiguity problems. The proposed WSI is immune to environmental noise using an active servo control system that serves as a phase compensating mechanism. Furthermore, a parallel CUDA programming model is presented as a solution to accelerate the computing analysis. The presented system can be used for on-line or in-process measurement on the shop floor.

AB - The optical interferometry systems are widely used for surface metrology. However, the environmental noise and the data analysis approach can limit the measurement performance during in- process inspection. This paper introduces a wavelength scanning interferometer (WSI) for micro and nano-scale areal surface measurement. The WSI can measure large discontinuous surface profiles without phase ambiguity problems. The proposed WSI is immune to environmental noise using an active servo control system that serves as a phase compensating mechanism. Furthermore, a parallel CUDA programming model is presented as a solution to accelerate the computing analysis. The presented system can be used for on-line or in-process measurement on the shop floor.

KW - Computing Acceleration

KW - CUDA

KW - Parallel Programming

KW - Stablisation

KW - Vibration Compensation

KW - Wavelength Scanning Interferometry

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EP - 76

JO - Procedia CIRP

T2 - Procedia CIRP

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