Accuracy improvement of a white-light spectral interferometer using a line-by-line spectral calibration method

Keyphrases

• Calibration Method 100%
• Accuracy Improvement 100%
• White-light Spectral Interferometer 100%
• Spectral Calibration 100%
• Surface Metrology 66%
• Calibration Experiment 33%
• Measurement Accuracy 33%
• Surface Profile 33%
• Measurement Results 33%
• Calibration Data 33%
• Scanning Process 33%
• Optical System 33%
• Metrology System 33%
• Wavelength Scanning 33%
• Silicon Wafer 33%
• Calibration Approach 33%
• Optical Path Difference 33%
• Aberrations 33%
• Acousto-optic Tunable Filter 33%
• Spectral Distortion 33%
• Calibration Equation 33%
• Line-by-line Method 33%

Engineering

• Instrument Calibration 100%
• Accuracy Improvement 100%
• Line Spectra 100%
• Simulation Result 50%
• Calibration Experiment 50%
• Surface Profile 50%
• Scanning Process 50%
• Optical Path 50%
• Optical Systems 50%
• Silicon Wafer 50%
• Line Method 50%
• Path Difference 50%
• Pixel Position 50%
• Spectral Distortion 50%