Actively stabilised optical device for potential on-line assessment of surfaces in ultra precision manufacturing

Xiangqian Jiang, Kaiwei Wang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper introduces a new surface measurement technique for potential online nano scale surface measurement applications. It attempts to generate a robust and miniature measurement device for future development into a multi-probe array measurement system. In this research, both the Fibre-Optic-Interferometry and the Wavelength-Division-Multiplexing techniques have been used, so that the optical probe and the optical interferometer are well-spaced allowing flexibility for on-line measurement. This system provides a self-reference signal to calibrate and stabilise the optical detection with high common-mode noise suppression by adopting an active phase tracking homodyne technique. Experiments were carried out to test the feasibility of the system. Properties of the technique were also discussed. The method should be a potential new tool for advanced manufacturing, especially for quality and process control in ultra precision manufacturing.

Original languageEnglish
Title of host publicationLaser Metrology and Machine Performance VIII
Subtitle of host publication8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007
EditorsE. Thornett
Place of PublicationBedford
Publishereuspen
Pages330-338
Number of pages9
ISBN (Print)9780955308239
Publication statusPublished - 2007
Event8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance - Cranfield, United Kingdom
Duration: 25 Jun 200728 Jun 2007
Conference number: 8

Conference

Conference8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance
Abbreviated titleLAMDAMAP 2007
CountryUnited Kingdom
CityCranfield
Period25/06/0728/06/07

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  • Cite this

    Jiang, X., & Wang, K. (2007). Actively stabilised optical device for potential on-line assessment of surfaces in ultra precision manufacturing. In E. Thornett (Ed.), Laser Metrology and Machine Performance VIII: 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007 (pp. 330-338). Bedford: euspen.