Actively Stabilized Optical Fiber Interferometry Technique fro Online/In-Process Surface Measurement

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

In this paper, we report the recent progress in optical-beam scanning fiber interferometry for potential online nanoscale surface measurement based on the previous research. It attempts to generate a robust and miniature measurement device for future development into a multiprobe array measurement system. In this research, both fiber-optic-interferometry and the wavelength-division- multiplexing techniques have been used, so that the optical probe and the optical interferometer are well spaced and fast surface scanning can be carried out, allowing flexibility for online measurement. In addition, this system provides a self-reference signal to stabilize the optical detection with high common-mode noise suppression by adopting an active phase tracking and stabilization technique. Low-frequency noise was significantly reduced compared with unstabilized result. The measurement of a sample surface shows an attained repeatability of 3.3 nm.

LanguageEnglish
Article number023109
JournalReview of Scientific Instruments
Volume79
Issue number2
DOIs
Publication statusPublished - 7 Mar 2008

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Surface measurement
Interferometry
Optical fibers
interferometry
optical fibers
Scanning
Wavelength division multiplexing
scanning
Interferometers
Fiber optics
wavelength division multiplexing
Stabilization
fiber optics
flexibility
interferometers
stabilization
retarding
Fibers
low frequencies
fibers

Cite this

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Actively Stabilized Optical Fiber Interferometry Technique fro Online/In-Process Surface Measurement. / Martin, Haydn; Jiang, Xiangqian; Wang, Kaiwei.

In: Review of Scientific Instruments, Vol. 79, No. 2, 023109, 07.03.2008.

Research output: Contribution to journalArticle

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