@article{00e0b1829a404f0c894d91ca54e9788e,
title = "Adaptive Phase Correction for Phase Measuring Deflectometry Based on Light Field Modulation",
abstract = "The phase measuring deflectometry is a powerful measuring method for complex optical surfaces, which captures the reflected fringe images associated with a displaying screen and calculates the normal vectors of the surface under test (SUT) accordingly. The captured images are usually set conjugate to the SUT, which in turn makes the screen defocused. As a result, the blurring effect caused by the point spread function (PSF) of the off-axis catadioptric imaging system can bias the solved phases. In order to correct the phase errors, a light field is constructed based on the Fourier compressive sensing method to describe the light transmission between the screen and camera pixels. Fringe modulation is conducted to enhance the robustness against noise, and then, space-variant PSFs can be extracted from the light field. The true phases are obtained by solving a Wiener deconvolution problem, with the merit function adaptively regularized by adjusting the damping parameter. The proposed method can correct adaptively the phase errors induced by the complex aberrations. Compared to the reference measurements, the form accuracy can be improved by four times.",
keywords = "Cameras, Optical imaging, Light fields, Phase measurement, Optical interferometry, Adaptive optics, Optical variables measurement, Optical metrology, Phase measuring deflectometry, Point spread function, Surface form",
author = "Zhenqi Niu and Xiangchao Zhang and Junqiang Ye and Lu Ye and Rui Zhu and Xiangqian Jiang",
note = "Funding Information: Manuscript received January 3, 2021; revised March 6, 2021; accepted March 10, 2021. Date of publication March 22, 2021; date of current version April 2, 2021. This work was supported in part by the National Key Research and Development Program of China under Grant 2017YFB1104700, in part by the National Natural Science Foundation of China under Grant 51875107, in part by the Fudan University-CIOMP Joint Fund under Grant FC2018–007, and in part by the SAST Fund under Grant 2019-086. The Associate Editor coordinating the review process was Dr. V. R. Singh. (Corresponding author: Xiangchao Zhang.) Zhenqi Niu, Xiangchao Zhang, Junqiang Ye, Lu Ye, and Rui Zhu are with the Shanghai Engineering Research Center of Ultra-Precision Optical Manufacturing, Fudan University, Shanghai 200438, China (e-mail: zxchao@fudan.edu.cn). Publisher Copyright: {\textcopyright} 1963-2012 IEEE. Copyright: Copyright 2021 Elsevier B.V., All rights reserved.",
year = "2021",
month = apr,
day = "2",
doi = "10.1109/TIM.2021.3067954",
language = "English",
volume = "70",
journal = "IEEE Transactions on Instrumentation and Measurement",
issn = "0018-9456",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
}