Advances in Micro and Nano-Scale Surface Metrology

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5 Citations (Scopus)

Abstract

This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.

Original languageEnglish
Pages (from-to)431-436
Number of pages6
JournalKey Engineering Materials
Volume295-296
DOIs
Publication statusPublished - 15 Oct 2005

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