Advances in Micro and Nano-Scale Surface Metrology

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.

LanguageEnglish
Pages431-436
Number of pages6
JournalKey Engineering Materials
Volume295-296
DOIs
Publication statusPublished - 15 Oct 2005

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Surface measurement
Industry

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title = "Advances in Micro and Nano-Scale Surface Metrology",
abstract = "This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.",
keywords = "Micro scale, Surface characterisation, Nano scale",
author = "L. Blunt and X. Jiang and Scott, {P. J.}",
year = "2005",
month = "10",
day = "15",
doi = "10.4028/www.scientific.net/KEM.295-296.431",
language = "English",
volume = "295-296",
pages = "431--436",
journal = "Key Engineering Materials",
issn = "1013-9826",
publisher = "Trans Tech Publications",

}

Advances in Micro and Nano-Scale Surface Metrology. / Blunt, L.; Jiang, X.; Scott, P. J.

In: Key Engineering Materials, Vol. 295-296, 15.10.2005, p. 431-436.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Advances in Micro and Nano-Scale Surface Metrology

AU - Blunt, L.

AU - Jiang, X.

AU - Scott, P. J.

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KW - Surface characterisation

KW - Nano scale

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