Advances in Micro and Nano-Scale Surface Metrology

L. Blunt; X. Jiang; P. J. Scott

doi:10.4028/www.scientific.net/KEM.295-296.431

Advances in Micro and Nano-Scale Surface Metrology

L. Blunt, X. Jiang, P. J. Scott

Taylor Hobson

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

Abstract

This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.

Original language	English
Pages (from-to)	431-436
Number of pages	6
Journal	Key Engineering Materials
Volume	295-296
DOIs	https://doi.org/10.4028/www.scientific.net/KEM.295-296.431
Publication status	Published - 15 Oct 2005

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title = "Advances in Micro and Nano-Scale Surface Metrology",

abstract = "This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.",

keywords = "Micro scale, Surface characterisation, Nano scale",

author = "L. Blunt and X. Jiang and Scott, \{P. J.\}",

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AU - Jiang, X.

AU - Scott, P. J.

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N2 - This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.

AB - This paper provides an overview of advances in the surface metrology field, concerning surface creation, measurement need, instrumentation, characterisation methods and standard development. It indicates industry requirements and further developments for micro and nano scalar surface metrology.

KW - Micro scale

KW - Surface characterisation

KW - Nano scale

UR - https://www.scopus.com/pages/publications/34249728934

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SP - 431

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JO - Key Engineering Materials

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Advances in Micro and Nano-Scale Surface Metrology

Abstract

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