An integrated opto-mechanical measurement system for in-process defect measurement on a roll-to-roll process

Keyphrases

• Al2O3 Layer 50%
• Autofocus 50%
• Barrier Film 50%
• Barrier Performance 50%
• Concept System 50%
• Control Information 50%
• Conveyor System 50%
• Defect Characterization 50%
• Defect Detection 100%
• Defect Measurement 100%
• High Magnification 50%
• In-process 100%
• Inspection System 100%
• Kinematics 50%
• Measurement Plane 50%
• Measurement System 100%
• Mechanical Measurement 100%
• Multi-wavelength Interferometer 50%
• Optical Measurement System 50%
• Optomechanics 100%
• Porous Air Bearing 50%
• Pre-existing Defects 50%
• Process Control 50%
• Roll-to-roll Process 100%
• Surface Deviation 50%
• Vapor Barrier 100%

Engineering

• Barrier Film 50%
• Barrier Performance 50%
• Control Information 50%
• Conveyor 50%
• Defect Detection 50%
• Flatness 50%
• Gas Bearing 50%
• Measurement System 100%
• Porosity 50%
• Process Control 50%
• Proof-of-Concept 50%
• Thin Films 50%