An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The quality and lifetime of flexible photovoltaic (PV) modules is dependent on having an effective vapour barrier layer which protects active elements from environmental degradation. An effective flexible barrier layer can be produced by employing a thin film of Al2O3 (40-100 nm thick) on a polymer substrate using atomic layer deposition (ALD). By measuring the surface of the barrier coating critical defects that will result in excess vapour transmission can be detected and minimised. Such, knowledge of defect size, type and distribution forms a crucial dataset for informing process control. This paper reports on a practical embedded inspection technique to measure the surface topography of the thin ALD deposited Al2O3 barrier film on a roll-to-roll manufacturing platform. The method combines wavelength scanning interferometry (WSI) along with an auto-focus method. Example measurements are given and discussed.

LanguageEnglish
Title of host publicationConference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
Publishereuspen
Pages177-180
Number of pages4
Volume1
ISBN (Electronic)9780956679031
Publication statusPublished - 2014
Event14th International Conference of the European Society for Precision Engineering and Nanotechnology - Dubrovnik, Croatia
Duration: 2 Jun 20146 Jun 2014
Conference number: 14
http://nanofutures.info/sites/default/files/Dubrovnik%20Call%20For%20Papers.pdf (Link to Call for Papers and Event Details)

Conference

Conference14th International Conference of the European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2014
CountryCroatia
CityDubrovnik
Period2/06/146/06/14
OtherCome and join your international peers, maintaining their leading edge on technology, customers, partners and suppliers. Access the greatest minds in micro and nano research and development. Share knowledge and information, and stimulate conversations
Internet address

Fingerprint

Atomic layer deposition
barrier layers
atomic layer epitaxy
Interferometry
interferometry
Vapors
vapors
Scanning
Wavelength
Defects
scanning
defects
Surface topography
Weathering
wavelengths
Process control
inspection
topography
Polymers
manufacturing

Cite this

Muhamedsalih, H., Blunt, L., Martin, H., Jiang, X., & Elrawemi, M. (2014). An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry. In Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014 (Vol. 1, pp. 177-180). euspen.
Muhamedsalih, H. ; Blunt, L. ; Martin, H. ; Jiang, X. ; Elrawemi, Mohamed. / An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry. Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014. Vol. 1 euspen, 2014. pp. 177-180
@inproceedings{38e5364aa9394a94a2b557730e442690,
title = "An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry",
abstract = "The quality and lifetime of flexible photovoltaic (PV) modules is dependent on having an effective vapour barrier layer which protects active elements from environmental degradation. An effective flexible barrier layer can be produced by employing a thin film of Al2O3 (40-100 nm thick) on a polymer substrate using atomic layer deposition (ALD). By measuring the surface of the barrier coating critical defects that will result in excess vapour transmission can be detected and minimised. Such, knowledge of defect size, type and distribution forms a crucial dataset for informing process control. This paper reports on a practical embedded inspection technique to measure the surface topography of the thin ALD deposited Al2O3 barrier film on a roll-to-roll manufacturing platform. The method combines wavelength scanning interferometry (WSI) along with an auto-focus method. Example measurements are given and discussed.",
keywords = "Auto focus, Embedded metrology and PV defect, Wavelength scanning",
author = "H. Muhamedsalih and L. Blunt and H. Martin and X. Jiang and Mohamed Elrawemi",
year = "2014",
language = "English",
volume = "1",
pages = "177--180",
booktitle = "Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014",
publisher = "euspen",

}

Muhamedsalih, H, Blunt, L, Martin, H, Jiang, X & Elrawemi, M 2014, An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry. in Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014. vol. 1, euspen, pp. 177-180, 14th International Conference of the European Society for Precision Engineering and Nanotechnology, Dubrovnik, Croatia, 2/06/14.

An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry. / Muhamedsalih, H.; Blunt, L.; Martin, H.; Jiang, X.; Elrawemi, Mohamed.

Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014. Vol. 1 euspen, 2014. p. 177-180.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry

AU - Muhamedsalih, H.

AU - Blunt, L.

AU - Martin, H.

AU - Jiang, X.

AU - Elrawemi, Mohamed

PY - 2014

Y1 - 2014

N2 - The quality and lifetime of flexible photovoltaic (PV) modules is dependent on having an effective vapour barrier layer which protects active elements from environmental degradation. An effective flexible barrier layer can be produced by employing a thin film of Al2O3 (40-100 nm thick) on a polymer substrate using atomic layer deposition (ALD). By measuring the surface of the barrier coating critical defects that will result in excess vapour transmission can be detected and minimised. Such, knowledge of defect size, type and distribution forms a crucial dataset for informing process control. This paper reports on a practical embedded inspection technique to measure the surface topography of the thin ALD deposited Al2O3 barrier film on a roll-to-roll manufacturing platform. The method combines wavelength scanning interferometry (WSI) along with an auto-focus method. Example measurements are given and discussed.

AB - The quality and lifetime of flexible photovoltaic (PV) modules is dependent on having an effective vapour barrier layer which protects active elements from environmental degradation. An effective flexible barrier layer can be produced by employing a thin film of Al2O3 (40-100 nm thick) on a polymer substrate using atomic layer deposition (ALD). By measuring the surface of the barrier coating critical defects that will result in excess vapour transmission can be detected and minimised. Such, knowledge of defect size, type and distribution forms a crucial dataset for informing process control. This paper reports on a practical embedded inspection technique to measure the surface topography of the thin ALD deposited Al2O3 barrier film on a roll-to-roll manufacturing platform. The method combines wavelength scanning interferometry (WSI) along with an auto-focus method. Example measurements are given and discussed.

KW - Auto focus

KW - Embedded metrology and PV defect

KW - Wavelength scanning

UR - http://www.scopus.com/inward/record.url?scp=84923186409&partnerID=8YFLogxK

M3 - Conference contribution

VL - 1

SP - 177

EP - 180

BT - Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014

PB - euspen

ER -

Muhamedsalih H, Blunt L, Martin H, Jiang X, Elrawemi M. An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry. In Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014. Vol. 1. euspen. 2014. p. 177-180