An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Citations (Scopus)

Abstract

The quality and lifetime of flexible photovoltaic (PV) modules is dependent on having an effective vapour barrier layer which protects active elements from environmental degradation. An effective flexible barrier layer can be produced by employing a thin film of Al2O3 (40-100 nm thick) on a polymer substrate using atomic layer deposition (ALD). By measuring the surface of the barrier coating critical defects that will result in excess vapour transmission can be detected and minimised. Such, knowledge of defect size, type and distribution forms a crucial dataset for informing process control. This paper reports on a practical embedded inspection technique to measure the surface topography of the thin ALD deposited Al2O3 barrier film on a roll-to-roll manufacturing platform. The method combines wavelength scanning interferometry (WSI) along with an auto-focus method. Example measurements are given and discussed.

Original languageEnglish
Title of host publicationConference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014
Publishereuspen
Pages177-180
Number of pages4
Volume1
ISBN (Electronic)9780956679031
Publication statusPublished - 2014
Event14th International Conference of the European Society for Precision Engineering and Nanotechnology - Dubrovnik, Croatia
Duration: 2 Jun 20146 Jun 2014
Conference number: 14
http://nanofutures.info/sites/default/files/Dubrovnik%20Call%20For%20Papers.pdf (Link to Call for Papers and Event Details)

Conference

Conference14th International Conference of the European Society for Precision Engineering and Nanotechnology
Abbreviated titleEUSPEN 2014
CountryCroatia
CityDubrovnik
Period2/06/146/06/14
OtherCome and join your international peers, maintaining their leading edge on technology, customers, partners and suppliers. Access the greatest minds in micro and nano research and development. Share knowledge and information, and stimulate conversations
Internet address

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  • Cite this

    Muhamedsalih, H., Blunt, L., Martin, H., Jiang, X., & Elrawemi, M. (2014). An interferometric auto-focusing method for on-line defect assessment on a roll-to-roll process using wavelength scanning interferometry. In Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014 (Vol. 1, pp. 177-180). euspen.