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The quality and lifetime of flexible photovoltaic (PV) modules is dependent on having an effective vapour barrier layer which protects active elements from environmental degradation. An effective flexible barrier layer can be produced by employing a thin film of Al2O3 (40-100 nm thick) on a polymer substrate using atomic layer deposition (ALD). By measuring the surface of the barrier coating critical defects that will result in excess vapour transmission can be detected and minimised. Such, knowledge of defect size, type and distribution forms a crucial dataset for informing process control. This paper reports on a practical embedded inspection technique to measure the surface topography of the thin ALD deposited Al2O3 barrier film on a roll-to-roll manufacturing platform. The method combines wavelength scanning interferometry (WSI) along with an auto-focus method. Example measurements are given and discussed.
|Title of host publication||Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014|
|Number of pages||4|
|Publication status||Published - 2014|
|Event||14th International Conference of the European Society for Precision Engineering and Nanotechnology - Dubrovnik, Croatia|
Duration: 2 Jun 2014 → 6 Jun 2014
Conference number: 14
http://nanofutures.info/sites/default/files/Dubrovnik%20Call%20For%20Papers.pdf (Link to Call for Papers and Event Details)
|Conference||14th International Conference of the European Society for Precision Engineering and Nanotechnology|
|Abbreviated title||EUSPEN 2014|
|Period||2/06/14 → 6/06/14|
|Other||Come and join your international peers, maintaining their leading edge on technology, customers, partners and suppliers. Access the greatest minds in micro and nano research and development. Share knowledge and information, and stimulate conversations|
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