An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms

Saif Al-Bashir; Hussam Muhamedsalih; Feng Gao; Xiangqian Jiang

An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms

Saif Al-Bashir, Hussam Muhamedsalih, Feng Gao, Xiangqian Jiang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this paper, we present a single-shot Dual-wavelength Polarized Interferometer (DPI) for measuring micro/nano-scale structured surfaces. This two-wavelength interferometer is combined with a polarization phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to ‘freeze’ any unwanted environmental disturbances. Two fringe analysis algorithms, for the evaluation of surface topography, are presented. Three standard step height samples are measured in order to investigate the performance of the DPI. The system has the potential to be used for measuring moving surfaces, and the measuring range is limited by synthetic wavelength.

Original language	English
Title of host publication	European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018
Editors	O. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips
Publisher	euspen
Pages	113-114
Number of pages	2
ISBN (Electronic)	9780995775121
ISBN (Print)	9780995775121
Publication status	Published - 5 Jun 2018
Event	European Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition - Venice, Italy Duration: 4 Jun 2018 → 8 Jun 2018 Conference number: 18 https://www.euspen.eu/events/18th-international-conference-exhibition-4th-8th-june-2018-2-2-2/ (Link to Conference Information)

Conference

Conference	European Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition
Abbreviated title	EUSPEN 2018
Country/Territory	Italy
City	Venice
Period	4/06/18 → 8/06/18
Internet address	https://www.euspen.eu/events/18th-international-conference-exhibition-4th-8th-june-2018-2-2-2/ (Link to Conference Information)

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Al-Bashir, S., Muhamedsalih, H., Gao, F., & Jiang, X. (2018). An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms. In O. Riemer, E. Savio, D. Billington, R. K. Leach, & D. Phillips (Eds.), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018 (pp. 113-114). euspen. https://www.euspen.eu/knowledge-base/ICE18262.pdf

Al-Bashir, Saif ; Muhamedsalih, Hussam ; Gao, Feng et al. / An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms. European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. editor / O. Riemer ; Enrico Savio ; D. Billington ; R. K. Leach ; D. Phillips. euspen, 2018. pp. 113-114

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title = "An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms",

abstract = "In this paper, we present a single-shot Dual-wavelength Polarized Interferometer (DPI) for measuring micro/nano-scale structured surfaces. This two-wavelength interferometer is combined with a polarization phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to {\textquoteleft}freeze{\textquoteright} any unwanted environmental disturbances. Two fringe analysis algorithms, for the evaluation of surface topography, are presented. Three standard step height samples are measured in order to investigate the performance of the DPI. The system has the potential to be used for measuring moving surfaces, and the measuring range is limited by synthetic wavelength.",

keywords = "single shot interferometer, Dual Wavelength interferometer, Polarised interferometer, Carre Algorithm, Four Step Phase Shift Algorithm, Carre and Four Step algorithms, Polarised interferometry, Two-wavelength, Single-shot",

author = "Saif Al-Bashir and Hussam Muhamedsalih and Feng Gao and Xiangqian Jiang",

year = "2018",

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publisher = "euspen",

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note = "European Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition, EUSPEN 2018 ; Conference date: 04-06-2018 Through 08-06-2018",

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Al-Bashir, S, Muhamedsalih, H , Gao, F & Jiang, X 2018, An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms. in O Riemer, E Savio, D Billington, RK Leach & D Phillips (eds), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. euspen, pp. 113-114, European Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition, Venice, Italy, 4/06/18. <https://www.euspen.eu/knowledge-base/ICE18262.pdf>

An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms. / Al-Bashir, Saif; Muhamedsalih, Hussam ; Gao, Feng et al.

European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. ed. / O. Riemer; Enrico Savio; D. Billington; R. K. Leach; D. Phillips. euspen, 2018. p. 113-114.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms

AU - Al-Bashir, Saif

AU - Muhamedsalih, Hussam

AU - Gao, Feng

AU - Jiang, Xiangqian

N1 - Conference code: 18

PY - 2018/6/5

Y1 - 2018/6/5

N2 - In this paper, we present a single-shot Dual-wavelength Polarized Interferometer (DPI) for measuring micro/nano-scale structured surfaces. This two-wavelength interferometer is combined with a polarization phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to ‘freeze’ any unwanted environmental disturbances. Two fringe analysis algorithms, for the evaluation of surface topography, are presented. Three standard step height samples are measured in order to investigate the performance of the DPI. The system has the potential to be used for measuring moving surfaces, and the measuring range is limited by synthetic wavelength.

AB - In this paper, we present a single-shot Dual-wavelength Polarized Interferometer (DPI) for measuring micro/nano-scale structured surfaces. This two-wavelength interferometer is combined with a polarization phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to ‘freeze’ any unwanted environmental disturbances. Two fringe analysis algorithms, for the evaluation of surface topography, are presented. Three standard step height samples are measured in order to investigate the performance of the DPI. The system has the potential to be used for measuring moving surfaces, and the measuring range is limited by synthetic wavelength.

KW - single shot interferometer

KW - Dual Wavelength interferometer

KW - Polarised interferometer

KW - Carre Algorithm

KW - Four Step Phase Shift Algorithm

KW - Carre and Four Step algorithms

KW - Polarised interferometry

KW - Two-wavelength

KW - Single-shot

UR - https://www.euspen.eu/product/18th-international-conference-proceedings/

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M3 - Conference contribution

SN - 9780995775121

SP - 113

EP - 114

BT - European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018

A2 - Riemer, O.

A2 - Savio, Enrico

A2 - Billington, D.

A2 - Leach, R. K.

A2 - Phillips, D.

PB - euspen

T2 - European Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition

Y2 - 4 June 2018 through 8 June 2018

ER -

Al-Bashir S, Muhamedsalih H , Gao F , Jiang X. An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms. In Riemer O, Savio E, Billington D, Leach RK, Phillips D, editors, European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. euspen. 2018. p. 113-114

An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms

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