An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we present a single-shot Dual-wavelength Polarized Interferometer (DPI) for measuring micro/nano-scale structured surfaces. This two-wavelength interferometer is combined with a polarization phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to ‘freeze’ any unwanted environmental disturbances. Two fringe analysis algorithms, for the evaluation of surface topography, are presented. Three standard step height samples are measured in order to investigate the performance of the DPI. The system has the potential to be used for measuring moving surfaces, and the measuring range is limited by synthetic wavelength.
Original languageEnglish
Title of host publicationEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018
EditorsO. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips
Publishereuspen
Pages113-114
Number of pages2
ISBN (Electronic)9780995775121
ISBN (Print)9780995775121
Publication statusPublished - 5 Jun 2018
EventEuropean Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition - Venice, Italy
Duration: 4 Jun 20188 Jun 2018
https://www.euspen.eu/events/18th-international-conference-exhibition-4th-8th-june-2018-2-2-2/ (Link to Conference Information)

Conference

ConferenceEuropean Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition
Abbreviated titleEUSPEN
CountryItaly
CityVenice
Period4/06/188/06/18
Internet address

Fingerprint

Phase shift
Interferometers
shot
phase shift
interferometers
Wavelength
wavelengths
Surface topography
ambiguity
topography
disturbances
Polarization
evaluation
polarization

Cite this

Al-Bashir, S., Muhamedsalih, H., Gao, F., & Jiang, X. (2018). An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms. In O. Riemer, E. Savio, D. Billington, R. K. Leach, & D. Phillips (Eds.), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018 (pp. 113-114). euspen.
Al-Bashir, Saif ; Muhamedsalih, Hussam ; Gao, Feng ; Jiang, Xiangqian. / An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms. European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. editor / O. Riemer ; Enrico Savio ; D. Billington ; R. K. Leach ; D. Phillips. euspen, 2018. pp. 113-114
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title = "An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms",
abstract = "In this paper, we present a single-shot Dual-wavelength Polarized Interferometer (DPI) for measuring micro/nano-scale structured surfaces. This two-wavelength interferometer is combined with a polarization phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to ‘freeze’ any unwanted environmental disturbances. Two fringe analysis algorithms, for the evaluation of surface topography, are presented. Three standard step height samples are measured in order to investigate the performance of the DPI. The system has the potential to be used for measuring moving surfaces, and the measuring range is limited by synthetic wavelength.",
keywords = "single shot interferometer, Dual Wavelength interferometer, Polarised interferometer, Carre Algorithm, Four Step Phase Shift Algorithm, Carre and Four Step algorithms, Polarised interferometry, Two-wavelength, Single-shot",
author = "Saif Al-Bashir and Hussam Muhamedsalih and Feng Gao and Xiangqian Jiang",
year = "2018",
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Al-Bashir, S, Muhamedsalih, H, Gao, F & Jiang, X 2018, An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms. in O Riemer, E Savio, D Billington, RK Leach & D Phillips (eds), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. euspen, pp. 113-114, European Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition, Venice, Italy, 4/06/18.

An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms. / Al-Bashir, Saif; Muhamedsalih, Hussam; Gao, Feng; Jiang, Xiangqian.

European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. ed. / O. Riemer; Enrico Savio; D. Billington; R. K. Leach; D. Phillips. euspen, 2018. p. 113-114.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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T1 - An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms

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N2 - In this paper, we present a single-shot Dual-wavelength Polarized Interferometer (DPI) for measuring micro/nano-scale structured surfaces. This two-wavelength interferometer is combined with a polarization phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to ‘freeze’ any unwanted environmental disturbances. Two fringe analysis algorithms, for the evaluation of surface topography, are presented. Three standard step height samples are measured in order to investigate the performance of the DPI. The system has the potential to be used for measuring moving surfaces, and the measuring range is limited by synthetic wavelength.

AB - In this paper, we present a single-shot Dual-wavelength Polarized Interferometer (DPI) for measuring micro/nano-scale structured surfaces. This two-wavelength interferometer is combined with a polarization phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to ‘freeze’ any unwanted environmental disturbances. Two fringe analysis algorithms, for the evaluation of surface topography, are presented. Three standard step height samples are measured in order to investigate the performance of the DPI. The system has the potential to be used for measuring moving surfaces, and the measuring range is limited by synthetic wavelength.

KW - single shot interferometer

KW - Dual Wavelength interferometer

KW - Polarised interferometer

KW - Carre Algorithm

KW - Four Step Phase Shift Algorithm

KW - Carre and Four Step algorithms

KW - Polarised interferometry

KW - Two-wavelength

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M3 - Conference contribution

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BT - European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018

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Al-Bashir S, Muhamedsalih H, Gao F, Jiang X. An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms. In Riemer O, Savio E, Billington D, Leach RK, Phillips D, editors, European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018. euspen. 2018. p. 113-114