An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In this paper, we present a single-shot Dual-wavelength Polarized Interferometer (DPI) for measuring micro/nano-scale structured surfaces. This two-wavelength interferometer is combined with a polarization phase shift method to extend the 2π ambiguity range without any mechanical movement, enabling a single-shot approach to ‘freeze’ any unwanted environmental disturbances. Two fringe analysis algorithms, for the evaluation of surface topography, are presented. Three standard step height samples are measured in order to investigate the performance of the DPI. The system has the potential to be used for measuring moving surfaces, and the measuring range is limited by synthetic wavelength.
Original languageEnglish
Title of host publicationEuropean Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018
EditorsO. Riemer, Enrico Savio, D. Billington, R. K. Leach, D. Phillips
Publishereuspen
Pages113-114
Number of pages2
ISBN (Electronic)9780995775121
ISBN (Print)9780995775121
Publication statusPublished - 5 Jun 2018
EventEuropean Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition - Venice, Italy
Duration: 4 Jun 20188 Jun 2018
https://www.euspen.eu/events/18th-international-conference-exhibition-4th-8th-june-2018-2-2-2/ (Link to Conference Information)

Conference

ConferenceEuropean Society for Precision Engineering and Nanotechnology 18th International Conference & Exhibition
Abbreviated titleEUSPEN
CountryItaly
CityVenice
Period4/06/188/06/18
Internet address

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  • Cite this

    Al-Bashir, S., Muhamedsalih, H., Gao, F., & Jiang, X. (2018). An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms. In O. Riemer, E. Savio, D. Billington, R. K. Leach, & D. Phillips (Eds.), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 18th International Conference and Exhibition, EUSPEN 2018 (pp. 113-114). euspen. https://www.euspen.eu/knowledge-base/ICE18262.pdf