An investigation of a single shot dual wavelength polarised interferometer which uses Carre and Four Step Phase Shift Algorithms

Keyphrases

• Interferometer 100%
• Dual-wavelength 100%
• Phase-shifting Algorithm 100%
• Four-step Phase-shifting 100%
• Algorithm Analysis 33%
• Surface Topography 33%
• Structured Surface 33%
• Micro-nano 33%
• Step Height Standard 33%
• Mechanical Movement 33%
• Environmental Disturbance 33%
• Fringe Analysis 33%
• Phase-shifting Method 33%
• Two-wavelength Interferometer 33%
• Synthetic Wavelength 33%
• Polarization Phase Shifting 33%
• Moving Surface 33%

Engineering

• Phase Shift 100%
• Structured Surface 50%
• Surface Topography 50%
• Nanoscale 50%
• Measuring Range 50%
• Environmental Disturbance 50%
• Range Ambiguity 50%
• Moving Surface 50%