An outline of a complementary inspection system for micro-electro-mechanical system (Mems) devices based on radiography and plenoptic camera

Alvin Chong, Guojin Feng, Jamil Kanfoud, Tat Hean Gan

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In the last decades, micro manufacturing was driven by micro-electro-mechanical systems (MEMS), where well-established manufacturing methods based on semiconductor technologies are able to produce structures in miniscule dimensions. Often, such modern electronic devices offer high level functionality in reduced space. However, such components may be impaired in several ways during fabrication and assembly stages resulting in damages or/and structural failures. To enable inspection of MEMS components, new technologies are needed to ensure reliable quality control in particular, in medical/aerospace industries where 100% quality inspection is required to achieve highest safety standards. In this paper, an outline of the inspection system architecture that can be applied to inspect MEMS component during the production phase using plenoptic camera and x-ray will be described. Preliminary test results demonstrate the system applicability. The inspection system aims to achieve an autonomous, reliable and accurate solution to reduce the production costs.

Original languageEnglish
Title of host publicationAdvances in Manufacturing Technology XXXII
Subtitle of host publicationProceedings of the 16th International Conference on Manufacturing Research, incorporating the 33rd National Conference on Manufacturing Research, September 11-13, 2018, University of Skövde Sweden
EditorsPeter Thorvald, Keith Case
PublisherIOS Press BV
Pages33-38
Number of pages6
Volume8
ISBN (Electronic)9781614999027
ISBN (Print)9781614999010
DOIs
Publication statusPublished - 1 Sep 2018
Externally publishedYes
Event16th International Conference on Manufacturing Research - Skovde, Sweden
Duration: 11 Sep 201813 Sep 2018
Conference number: 16

Publication series

NameAdvances in Transdisciplinary Engineering
PublisherIOS Press
Volume8
ISSN (Print)2352-751X
ISSN (Electronic)2352-7528

Conference

Conference16th International Conference on Manufacturing Research
Abbreviated titleICMR 2018
CountrySweden
CitySkovde
Period11/09/1813/09/18

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  • Cite this

    Chong, A., Feng, G., Kanfoud, J., & Gan, T. H. (2018). An outline of a complementary inspection system for micro-electro-mechanical system (Mems) devices based on radiography and plenoptic camera. In P. Thorvald, & K. Case (Eds.), Advances in Manufacturing Technology XXXII: Proceedings of the 16th International Conference on Manufacturing Research, incorporating the 33rd National Conference on Manufacturing Research, September 11-13, 2018, University of Skövde Sweden (Vol. 8, pp. 33-38). (Advances in Transdisciplinary Engineering; Vol. 8). IOS Press BV. https://doi.org/10.3233/978-1-61499-902-7-33