An outline of a complementary inspection system for micro-electro-mechanical system (Mems) devices based on radiography and plenoptic camera

Alvin Chong; Guojin Feng; Jamil Kanfoud; Tat Hean Gan

doi:10.3233/978-1-61499-902-7-33

An outline of a complementary inspection system for micro-electro-mechanical system (Mems) devices based on radiography and plenoptic camera

Alvin Chong, Guojin Feng, Jamil Kanfoud, Tat Hean Gan

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In the last decades, micro manufacturing was driven by micro-electro-mechanical systems (MEMS), where well-established manufacturing methods based on semiconductor technologies are able to produce structures in miniscule dimensions. Often, such modern electronic devices offer high level functionality in reduced space. However, such components may be impaired in several ways during fabrication and assembly stages resulting in damages or/and structural failures. To enable inspection of MEMS components, new technologies are needed to ensure reliable quality control in particular, in medical/aerospace industries where 100% quality inspection is required to achieve highest safety standards. In this paper, an outline of the inspection system architecture that can be applied to inspect MEMS component during the production phase using plenoptic camera and x-ray will be described. Preliminary test results demonstrate the system applicability. The inspection system aims to achieve an autonomous, reliable and accurate solution to reduce the production costs.

Original language	English
Title of host publication	Advances in Manufacturing Technology XXXII
Subtitle of host publication	Proceedings of the 16th International Conference on Manufacturing Research, incorporating the 33rd National Conference on Manufacturing Research, September 11-13, 2018, University of Skövde Sweden
Editors	Peter Thorvald, Keith Case
Publisher	IOS Press BV
Pages	33-38
Number of pages	6
Volume	8
ISBN (Electronic)	9781614999027
ISBN (Print)	9781614999010
DOIs	https://doi.org/10.3233/978-1-61499-902-7-33
Publication status	Published - 1 Sep 2018
Externally published	Yes
Event	16th International Conference on Manufacturing Research - Skovde, Sweden Duration: 11 Sep 2018 → 13 Sep 2018 Conference number: 16

Publication series

Name	Advances in Transdisciplinary Engineering
Publisher	IOS Press
Volume	8
ISSN (Print)	2352-751X
ISSN (Electronic)	2352-7528

Conference

Conference	16th International Conference on Manufacturing Research
Abbreviated title	ICMR 2018
Country/Territory	Sweden
City	Skovde
Period	11/09/18 → 13/09/18

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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Chong, A., Feng, G., Kanfoud, J., & Gan, T. H. (2018). An outline of a complementary inspection system for micro-electro-mechanical system (Mems) devices based on radiography and plenoptic camera. In P. Thorvald, & K. Case (Eds.), Advances in Manufacturing Technology XXXII: Proceedings of the 16th International Conference on Manufacturing Research, incorporating the 33rd National Conference on Manufacturing Research, September 11-13, 2018, University of Skövde Sweden (Vol. 8, pp. 33-38). (Advances in Transdisciplinary Engineering; Vol. 8). IOS Press BV. https://doi.org/10.3233/978-1-61499-902-7-33

Chong, Alvin ; Feng, Guojin ; Kanfoud, Jamil et al. / An outline of a complementary inspection system for micro-electro-mechanical system (Mems) devices based on radiography and plenoptic camera. Advances in Manufacturing Technology XXXII: Proceedings of the 16th International Conference on Manufacturing Research, incorporating the 33rd National Conference on Manufacturing Research, September 11-13, 2018, University of Skövde Sweden. editor / Peter Thorvald ; Keith Case. Vol. 8 IOS Press BV, 2018. pp. 33-38 (Advances in Transdisciplinary Engineering).

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title = "An outline of a complementary inspection system for micro-electro-mechanical system (Mems) devices based on radiography and plenoptic camera",

abstract = "In the last decades, micro manufacturing was driven by micro-electro-mechanical systems (MEMS), where well-established manufacturing methods based on semiconductor technologies are able to produce structures in miniscule dimensions. Often, such modern electronic devices offer high level functionality in reduced space. However, such components may be impaired in several ways during fabrication and assembly stages resulting in damages or/and structural failures. To enable inspection of MEMS components, new technologies are needed to ensure reliable quality control in particular, in medical/aerospace industries where 100% quality inspection is required to achieve highest safety standards. In this paper, an outline of the inspection system architecture that can be applied to inspect MEMS component during the production phase using plenoptic camera and x-ray will be described. Preliminary test results demonstrate the system applicability. The inspection system aims to achieve an autonomous, reliable and accurate solution to reduce the production costs.",

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author = "Alvin Chong and Guojin Feng and Jamil Kanfoud and Gan, {Tat Hean}",

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Chong, A, Feng, G, Kanfoud, J & Gan, TH 2018, An outline of a complementary inspection system for micro-electro-mechanical system (Mems) devices based on radiography and plenoptic camera. in P Thorvald & K Case (eds), Advances in Manufacturing Technology XXXII: Proceedings of the 16th International Conference on Manufacturing Research, incorporating the 33rd National Conference on Manufacturing Research, September 11-13, 2018, University of Skövde Sweden. vol. 8, Advances in Transdisciplinary Engineering, vol. 8, IOS Press BV, pp. 33-38, 16th International Conference on Manufacturing Research, Skovde, Sweden, 11/09/18. https://doi.org/10.3233/978-1-61499-902-7-33

An outline of a complementary inspection system for micro-electro-mechanical system (Mems) devices based on radiography and plenoptic camera. / Chong, Alvin; Feng, Guojin; Kanfoud, Jamil et al.

Advances in Manufacturing Technology XXXII: Proceedings of the 16th International Conference on Manufacturing Research, incorporating the 33rd National Conference on Manufacturing Research, September 11-13, 2018, University of Skövde Sweden. ed. / Peter Thorvald; Keith Case. Vol. 8 IOS Press BV, 2018. p. 33-38 (Advances in Transdisciplinary Engineering; Vol. 8).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Feng, Guojin

AU - Kanfoud, Jamil

AU - Gan, Tat Hean

N1 - Conference code: 16

PY - 2018/9/1

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N2 - In the last decades, micro manufacturing was driven by micro-electro-mechanical systems (MEMS), where well-established manufacturing methods based on semiconductor technologies are able to produce structures in miniscule dimensions. Often, such modern electronic devices offer high level functionality in reduced space. However, such components may be impaired in several ways during fabrication and assembly stages resulting in damages or/and structural failures. To enable inspection of MEMS components, new technologies are needed to ensure reliable quality control in particular, in medical/aerospace industries where 100% quality inspection is required to achieve highest safety standards. In this paper, an outline of the inspection system architecture that can be applied to inspect MEMS component during the production phase using plenoptic camera and x-ray will be described. Preliminary test results demonstrate the system applicability. The inspection system aims to achieve an autonomous, reliable and accurate solution to reduce the production costs.

AB - In the last decades, micro manufacturing was driven by micro-electro-mechanical systems (MEMS), where well-established manufacturing methods based on semiconductor technologies are able to produce structures in miniscule dimensions. Often, such modern electronic devices offer high level functionality in reduced space. However, such components may be impaired in several ways during fabrication and assembly stages resulting in damages or/and structural failures. To enable inspection of MEMS components, new technologies are needed to ensure reliable quality control in particular, in medical/aerospace industries where 100% quality inspection is required to achieve highest safety standards. In this paper, an outline of the inspection system architecture that can be applied to inspect MEMS component during the production phase using plenoptic camera and x-ray will be described. Preliminary test results demonstrate the system applicability. The inspection system aims to achieve an autonomous, reliable and accurate solution to reduce the production costs.

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ER -

Chong A, Feng G, Kanfoud J, Gan TH. An outline of a complementary inspection system for micro-electro-mechanical system (Mems) devices based on radiography and plenoptic camera. In Thorvald P, Case K, editors, Advances in Manufacturing Technology XXXII: Proceedings of the 16th International Conference on Manufacturing Research, incorporating the 33rd National Conference on Manufacturing Research, September 11-13, 2018, University of Skövde Sweden. Vol. 8. IOS Press BV. 2018. p. 33-38. (Advances in Transdisciplinary Engineering). doi: 10.3233/978-1-61499-902-7-33

An outline of a complementary inspection system for micro-electro-mechanical system (Mems) devices based on radiography and plenoptic camera

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