An ultra-compact metasurface-based chromatic confocal sensor

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1 Citation (Scopus)

Abstract

Metasurfaces are planar optical elements that provide much greater freedom in manipulating light than conventional optics. This article explores the potential for miniaturised metasurface-based optical sensors. We consider the realisation of a chromatic confocal sensor for position measurement, where a conventional hyperchromatic lens is replaced by a metasurface. The design and fabrication process for a metasurface based on truncated-waveguide type meta-atoms is described. Experimental evaluation of the sensor performance confirms the potential for metasurface-based optical sensors to form the basis of a new generation of miniature, lightweight, low-cost optical sensors to support the data-driven manufacturing technologies of the future.
Original languageEnglish
Pages (from-to)465-468
Number of pages4
JournalCIRP Annals - Manufacturing Technology
Volume72
Issue number1
Early online date13 Jul 2023
DOIs
Publication statusPublished - 13 Jul 2023

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