@article{3d21ef1f35454117a6cc2e7f3eb8b87f,
title = "An ultra-compact metasurface-based chromatic confocal sensor",
abstract = "Metasurfaces are planar optical elements that provide much greater freedom in manipulating light than conventional optics. This article explores the potential for miniaturised metasurface-based optical sensors. We consider the realisation of a chromatic confocal sensor for position measurement, where a conventional hyperchromatic lens is replaced by a metasurface. The design and fabrication process for a metasurface based on truncated-waveguide type meta-atoms is described. Experimental evaluation of the sensor performance confirms the potential for metasurface-based optical sensors to form the basis of a new generation of miniature, lightweight, low-cost optical sensors to support the data-driven manufacturing technologies of the future.",
keywords = "Optical, Metasurface, Metrology",
author = "Chan, {Ho Tin} and Dawei Tang and James Williamson and Haydn Martin and Andrew Henning and Jane Jiang",
note = "Funding Information: The authors gratefully acknowledge the UK's Engineering and Physical Sciences Research Council (EPSRC) funded programmes EP/T02643X/1 and EP/P006930/1 as well as the UK's Royal Academy of Engineering (RAEng) and Renishaw PLC who co-sponsor Prof. Jiang's RAEng/Renishaw Research Chair. The data that support the findings of this study are openly available at: Martin, H. (2023), “Dataset: An ultra-compact metasurface-based chromatic confocal sensor”, Mendeley Data, doi: 10.17632/73482hj84g.1 . Publisher Copyright: {\textcopyright} 2023 The Authors",
year = "2023",
month = apr,
day = "27",
doi = "10.1016/j.cirp.2023.04.002",
language = "English",
journal = "CIRP Annals - Manufacturing Technology",
issn = "0007-8506",
publisher = "Elsevier USA",
}
