An ultra-compact metasurface-based chromatic confocal sensor

Ho Tin Chan; Dawei Tang; James Williamson; Haydn Martin; Andrew Henning; Jane Jiang

doi:10.1016/j.cirp.2023.04.002

An ultra-compact metasurface-based chromatic confocal sensor

Ho Tin Chan, Dawei Tang, James Williamson, Haydn Martin, Andrew Henning, Jane Jiang

Research output: Contribution to journal › Article › peer-review

13 Citations (Scopus)

Abstract

Metasurfaces are planar optical elements that provide much greater freedom in manipulating light than conventional optics. This article explores the potential for miniaturised metasurface-based optical sensors. We consider the realisation of a chromatic confocal sensor for position measurement, where a conventional hyperchromatic lens is replaced by a metasurface. The design and fabrication process for a metasurface based on truncated-waveguide type meta-atoms is described. Experimental evaluation of the sensor performance confirms the potential for metasurface-based optical sensors to form the basis of a new generation of miniature, lightweight, low-cost optical sensors to support the data-driven manufacturing technologies of the future.

Original language	English
Pages (from-to)	465-468
Number of pages	4
Journal	CIRP Annals - Manufacturing Technology
Volume	72
Issue number	1
Early online date	13 Jul 2023
DOIs	https://doi.org/10.1016/j.cirp.2023.04.002
Publication status	Published - 13 Jul 2023

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10.1016/j.cirp.2023.04.002Licence: CC BY

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title = "An ultra-compact metasurface-based chromatic confocal sensor",

abstract = "Metasurfaces are planar optical elements that provide much greater freedom in manipulating light than conventional optics. This article explores the potential for miniaturised metasurface-based optical sensors. We consider the realisation of a chromatic confocal sensor for position measurement, where a conventional hyperchromatic lens is replaced by a metasurface. The design and fabrication process for a metasurface based on truncated-waveguide type meta-atoms is described. Experimental evaluation of the sensor performance confirms the potential for metasurface-based optical sensors to form the basis of a new generation of miniature, lightweight, low-cost optical sensors to support the data-driven manufacturing technologies of the future.",

keywords = "Optical, Metasurface, Metrology",

author = "Chan, \{Ho Tin\} and Dawei Tang and James Williamson and Haydn Martin and Andrew Henning and Jane Jiang",

note = "Funding Information: The authors gratefully acknowledge the UK's Engineering and Physical Sciences Research Council (EPSRC) funded programmes EP/T02643X/1 and EP/P006930/1 as well as the UK's Royal Academy of Engineering (RAEng) and Renishaw PLC who co-sponsor Prof. Jiang's RAEng/Renishaw Research Chair. The data that support the findings of this study are openly available at: Martin, H. (2023), “Dataset: An ultra-compact metasurface-based chromatic confocal sensor”, Mendeley Data, doi: 10.17632/73482hj84g.1 . Publisher Copyright: {\textcopyright} 2023 The Authors",

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doi = "10.1016/j.cirp.2023.04.002",

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AU - Chan, Ho Tin

AU - Tang, Dawei

AU - Williamson, James

AU - Martin, Haydn

AU - Henning, Andrew

AU - Jiang, Jane

N1 - Funding Information: The authors gratefully acknowledge the UK's Engineering and Physical Sciences Research Council (EPSRC) funded programmes EP/T02643X/1 and EP/P006930/1 as well as the UK's Royal Academy of Engineering (RAEng) and Renishaw PLC who co-sponsor Prof. Jiang's RAEng/Renishaw Research Chair. The data that support the findings of this study are openly available at: Martin, H. (2023), “Dataset: An ultra-compact metasurface-based chromatic confocal sensor”, Mendeley Data, doi: 10.17632/73482hj84g.1 . Publisher Copyright: © 2023 The Authors

PY - 2023/7/13

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N2 - Metasurfaces are planar optical elements that provide much greater freedom in manipulating light than conventional optics. This article explores the potential for miniaturised metasurface-based optical sensors. We consider the realisation of a chromatic confocal sensor for position measurement, where a conventional hyperchromatic lens is replaced by a metasurface. The design and fabrication process for a metasurface based on truncated-waveguide type meta-atoms is described. Experimental evaluation of the sensor performance confirms the potential for metasurface-based optical sensors to form the basis of a new generation of miniature, lightweight, low-cost optical sensors to support the data-driven manufacturing technologies of the future.

AB - Metasurfaces are planar optical elements that provide much greater freedom in manipulating light than conventional optics. This article explores the potential for miniaturised metasurface-based optical sensors. We consider the realisation of a chromatic confocal sensor for position measurement, where a conventional hyperchromatic lens is replaced by a metasurface. The design and fabrication process for a metasurface based on truncated-waveguide type meta-atoms is described. Experimental evaluation of the sensor performance confirms the potential for metasurface-based optical sensors to form the basis of a new generation of miniature, lightweight, low-cost optical sensors to support the data-driven manufacturing technologies of the future.

KW - Optical

KW - Metasurface

KW - Metrology

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JF - CIRP Annals - Manufacturing Technology

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An ultra-compact metasurface-based chromatic confocal sensor

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