Analysis of the synchronous phase-shifting method in a white-light spectral interferometer

Tong Guo, Lin Yuan, Dawei Tang, Zhuo Chen, Feng Gao, Jane Jiang

Research output: Contribution to journalArticle

Abstract

For white-lightspectral interferometry, the phase information is usually retrieved via the Fourier transform method and the temporal phase-shifting method. In comparison, the synchronous phase-shifting method can be used to synchronously acquire interferometricsignals with good accuracy and reduced noise. Therefore, it has potential for online measurement and issuitable for application in precision industries and for ultrahigh-speed measurement. In this work, a white-light spectral interferometer for synchronous phase shifting based on polarization interference was built, and the two-step phase-shifting algorithm was used to retrieve phase information. A variety of spectral interferometric signals were simulated based on the mathematical model of the two-step phase-shifting algorithm to illustrate the effects of differences in intensity and envelope shape, random noise, and phase-shift error on measurement of the absolute distance. Measurements of the absolute distance were conducted, and they indicated that the system had high accuracy.
Original languageEnglish
Article number385784
Pages (from-to)2983-2991
Number of pages9
JournalApplied Optics
Volume59
Issue number10
Early online date25 Mar 2020
DOIs
Publication statusPublished - 1 Apr 2020

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