Abstract
For white-lightspectral interferometry, the phase information is usually retrieved via the Fourier transform method and the temporal phase-shifting method. In comparison, the synchronous phase-shifting method can be used to synchronously acquire interferometricsignals with good accuracy and reduced noise. Therefore, it has potential for online measurement and issuitable for application in precision industries and for ultrahigh-speed measurement. In this work, a white-light spectral interferometer for synchronous phase shifting based on polarization interference was built, and the two-step phase-shifting algorithm was used to retrieve phase information. A variety of spectral interferometric signals were simulated based on the mathematical model of the two-step phase-shifting algorithm to illustrate the effects of differences in intensity and envelope shape, random noise, and phase-shift error on measurement of the absolute distance. Measurements of the absolute distance were conducted, and they indicated that the system had high accuracy.
Original language | English |
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Article number | 385784 |
Pages (from-to) | 2983-2991 |
Number of pages | 9 |
Journal | Applied Optics |
Volume | 59 |
Issue number | 10 |
Early online date | 25 Mar 2020 |
DOIs | |
Publication status | Published - 1 Apr 2020 |