Arsenic redistribution after solid phase epitaxial regrowth of shallow pre-amorphized silicon layers

E. Demenev, D. Giubertoni, S. Gennaro, M. Bersani, E. Hourdakis, A. G. Nassiopoulou, M. A. Reading, J. A. Van Den Berg

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

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Physics & Astronomy