Atomistic Simulation of Damage Accumulation during Shallow B and As Implant into Si

Pedro López, Lourdes Pelaz, Luis A. Marqués, Iván Santos, J. A. Van Den Berg

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Fingerprint Dive into the research topics of 'Atomistic Simulation of Damage Accumulation during Shallow B and As Implant into Si'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds