Blowing of polycrystalline silicon fuses

W. T. Lee; A. C. Fowler; O. Power; S. Healy; J. Browne

doi:10.1063/1.3457469

Blowing of polycrystalline silicon fuses

W. T. Lee, A. C. Fowler, O. Power, S. Healy, J. Browne

Research output: Contribution to journal › Article › peer-review

3 Citations (Scopus)

Abstract

Polycrystalline silicon fuses are one time programmable memory elements which allow the calibration of integrated circuits at wafer and package level. We present a zero-dimensional lumped parameter model of the programming of fuses made from a combination of tungsten silicide and polycrystalline silicon. The components of the model are an electrical model, a thermal model, and a flow model. The model generates quantitatively accurate results and reproduces trends with applied voltage and fuse size.

Original language	English
Article number	023502
Journal	Applied Physics Letters
Volume	97
Issue number	2
Early online date	12 Jul 2010
DOIs	https://doi.org/10.1063/1.3457469
Publication status	Published - 12 Jul 2010
Externally published	Yes

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keywords = "Polycrystalline silicon fuses",

author = "Lee, {W. T.} and Fowler, {A. C.} and O. Power and S. Healy and J. Browne",

note = "Funding Information: We acknowledge support of the Mathematics Applications Consortium for Science and Industry (www.macsi.ul.ie) funded by the Science Foundation Ireland Mathematics Initiative Grant No. 06/MI/005.",

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AU - Lee, W. T.

AU - Fowler, A. C.

AU - Power, O.

AU - Healy, S.

AU - Browne, J.

N1 - Funding Information: We acknowledge support of the Mathematics Applications Consortium for Science and Industry (www.macsi.ul.ie) funded by the Science Foundation Ireland Mathematics Initiative Grant No. 06/MI/005.

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N2 - Polycrystalline silicon fuses are one time programmable memory elements which allow the calibration of integrated circuits at wafer and package level. We present a zero-dimensional lumped parameter model of the programming of fuses made from a combination of tungsten silicide and polycrystalline silicon. The components of the model are an electrical model, a thermal model, and a flow model. The model generates quantitatively accurate results and reproduces trends with applied voltage and fuse size.

AB - Polycrystalline silicon fuses are one time programmable memory elements which allow the calibration of integrated circuits at wafer and package level. We present a zero-dimensional lumped parameter model of the programming of fuses made from a combination of tungsten silicide and polycrystalline silicon. The components of the model are an electrical model, a thermal model, and a flow model. The model generates quantitatively accurate results and reproduces trends with applied voltage and fuse size.

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Blowing of polycrystalline silicon fuses

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