Blowing of polycrystalline silicon fuses

W. T. Lee, A. C. Fowler, O. Power, S. Healy, J. Browne

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)


Polycrystalline silicon fuses are one time programmable memory elements which allow the calibration of integrated circuits at wafer and package level. We present a zero-dimensional lumped parameter model of the programming of fuses made from a combination of tungsten silicide and polycrystalline silicon. The components of the model are an electrical model, a thermal model, and a flow model. The model generates quantitatively accurate results and reproduces trends with applied voltage and fuse size.

Original languageEnglish
Article number023502
JournalApplied Physics Letters
Issue number2
Early online date12 Jul 2010
Publication statusPublished - 12 Jul 2010
Externally publishedYes


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