Burg algorithm for enhancing measurement performance in wavelength scanning interferometry

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Abstract

Wavelength scanning interferometry (WSI) is a technique for measuring surface topography that is capable of resolving step discontinuities and does not require any mechanical movement of the apparatus or measurand, allowing measurement times to be reduced substantially in comparison to related techniques. The axial (height) resolution and measurement range in WSI depends in part on the algorithm used to evaluate the spectral interferograms. Previously reported Fourier transform based methods have a number of limitations which is in part due to the short data lengths obtained. This paper compares the performance auto-regressive model based techniques for frequency estimation in WSI. Specifically, the Burg method is compared with established Fourier transform based approaches using both simulation and experimental data taken from a WSI measurement of a step-height sample.

LanguageEnglish
Article number024003
Number of pages8
JournalSurface Topography: Metrology and Properties
Volume4
Issue number2
DOIs
Publication statusPublished - 19 Feb 2016

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Interferometry
interferometry
Scanning
Wavelength
scanning
wavelengths
Fourier transforms
Frequency estimation
Surface topography
Time measurement
rangefinding
discontinuity
topography
time measurement
simulation

Cite this

@article{3aa90f945a2e48bcbcc279266e4d63bf,
title = "Burg algorithm for enhancing measurement performance in wavelength scanning interferometry",
abstract = "Wavelength scanning interferometry (WSI) is a technique for measuring surface topography that is capable of resolving step discontinuities and does not require any mechanical movement of the apparatus or measurand, allowing measurement times to be reduced substantially in comparison to related techniques. The axial (height) resolution and measurement range in WSI depends in part on the algorithm used to evaluate the spectral interferograms. Previously reported Fourier transform based methods have a number of limitations which is in part due to the short data lengths obtained. This paper compares the performance auto-regressive model based techniques for frequency estimation in WSI. Specifically, the Burg method is compared with established Fourier transform based approaches using both simulation and experimental data taken from a WSI measurement of a step-height sample.",
keywords = "Burg, Fourier transform, Instrumentation, Interferometry, Surface metrology",
author = "Rebecca Woodcock and Hussam Muhamedsalih and Haydn Martin and Xiangqian Jiang",
note = "Accepted Dec 2015 HN 13/10/2017",
year = "2016",
month = "2",
day = "19",
doi = "10.1088/2051-672X/4/2/024003",
language = "English",
volume = "4",
journal = "Surface Topography: Metrology and Properties",
issn = "2051-672X",
publisher = "IOP Publishing Ltd.",
number = "2",

}

TY - JOUR

T1 - Burg algorithm for enhancing measurement performance in wavelength scanning interferometry

AU - Woodcock, Rebecca

AU - Muhamedsalih, Hussam

AU - Martin, Haydn

AU - Jiang, Xiangqian

N1 - Accepted Dec 2015 HN 13/10/2017

PY - 2016/2/19

Y1 - 2016/2/19

N2 - Wavelength scanning interferometry (WSI) is a technique for measuring surface topography that is capable of resolving step discontinuities and does not require any mechanical movement of the apparatus or measurand, allowing measurement times to be reduced substantially in comparison to related techniques. The axial (height) resolution and measurement range in WSI depends in part on the algorithm used to evaluate the spectral interferograms. Previously reported Fourier transform based methods have a number of limitations which is in part due to the short data lengths obtained. This paper compares the performance auto-regressive model based techniques for frequency estimation in WSI. Specifically, the Burg method is compared with established Fourier transform based approaches using both simulation and experimental data taken from a WSI measurement of a step-height sample.

AB - Wavelength scanning interferometry (WSI) is a technique for measuring surface topography that is capable of resolving step discontinuities and does not require any mechanical movement of the apparatus or measurand, allowing measurement times to be reduced substantially in comparison to related techniques. The axial (height) resolution and measurement range in WSI depends in part on the algorithm used to evaluate the spectral interferograms. Previously reported Fourier transform based methods have a number of limitations which is in part due to the short data lengths obtained. This paper compares the performance auto-regressive model based techniques for frequency estimation in WSI. Specifically, the Burg method is compared with established Fourier transform based approaches using both simulation and experimental data taken from a WSI measurement of a step-height sample.

KW - Burg

KW - Fourier transform

KW - Instrumentation

KW - Interferometry

KW - Surface metrology

UR - http://www.scopus.com/inward/record.url?scp=85010825634&partnerID=8YFLogxK

U2 - 10.1088/2051-672X/4/2/024003

DO - 10.1088/2051-672X/4/2/024003

M3 - Article

VL - 4

JO - Surface Topography: Metrology and Properties

T2 - Surface Topography: Metrology and Properties

JF - Surface Topography: Metrology and Properties

SN - 2051-672X

IS - 2

M1 - 024003

ER -