Calibration of transfer standards for SPM

Feng Gao-Feng; Gwo Sheng Peng; L. Koenders

doi:10.1016/S0167-9317(98)00144-0

Calibration of transfer standards for SPM

Gao-Feng, Gwo Sheng Peng, L. Koenders

Research output: Contribution to journal › Article › peer-review

Abstract

A scanning probe microscope was used to investigate and to calibrate some of the today available samples on the market used for calibration of other SPMs. These samples have artificial structures between 200 nm and 10 μm fabricated by optical or electron beam lithography. A SPM was used which is equipped with capacitive sensors and carefully calibrated by using laser interferometer.

Original language	English
Pages (from-to)	615-618
Number of pages	4
Journal	Microelectronic Engineering
Volume	41-42
DOIs	https://doi.org/10.1016/S0167-9317(98)00144-0
Publication status	Published - Mar 1998
Externally published	Yes

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@article{15940408a34b407f81b5e4e30d3b13de,

title = "Calibration of transfer standards for SPM",

abstract = "A scanning probe microscope was used to investigate and to calibrate some of the today available samples on the market used for calibration of other SPMs. These samples have artificial structures between 200 nm and 10 μm fabricated by optical or electron beam lithography. A SPM was used which is equipped with capacitive sensors and carefully calibrated by using laser interferometer.",

author = "Gao-Feng and Peng, {Gwo Sheng} and L. Koenders",

year = "1998",

month = mar,

doi = "10.1016/S0167-9317(98)00144-0",

language = "English",

volume = "41-42",

pages = "615--618",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}

TY - JOUR

T1 - Calibration of transfer standards for SPM

AU - Gao-Feng, null

AU - Peng, Gwo Sheng

AU - Koenders, L.

PY - 1998/3

Y1 - 1998/3

N2 - A scanning probe microscope was used to investigate and to calibrate some of the today available samples on the market used for calibration of other SPMs. These samples have artificial structures between 200 nm and 10 μm fabricated by optical or electron beam lithography. A SPM was used which is equipped with capacitive sensors and carefully calibrated by using laser interferometer.

AB - A scanning probe microscope was used to investigate and to calibrate some of the today available samples on the market used for calibration of other SPMs. These samples have artificial structures between 200 nm and 10 μm fabricated by optical or electron beam lithography. A SPM was used which is equipped with capacitive sensors and carefully calibrated by using laser interferometer.

UR - http://www.scopus.com/inward/record.url?scp=12844273051&partnerID=8YFLogxK

U2 - 10.1016/S0167-9317(98)00144-0

DO - 10.1016/S0167-9317(98)00144-0

M3 - Article

AN - SCOPUS:12844273051

VL - 41-42

SP - 615

EP - 618

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -

Calibration of transfer standards for SPM

Abstract

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