Calibration of transfer standards for SPM

Gao-Feng, Gwo Sheng Peng, L. Koenders

Research output: Contribution to journalArticle

Abstract

A scanning probe microscope was used to investigate and to calibrate some of the today available samples on the market used for calibration of other SPMs. These samples have artificial structures between 200 nm and 10 μm fabricated by optical or electron beam lithography. A SPM was used which is equipped with capacitive sensors and carefully calibrated by using laser interferometer.

Original languageEnglish
Pages (from-to)615-618
Number of pages4
JournalMicroelectronic Engineering
Volume41-42
DOIs
Publication statusPublished - Mar 1998
Externally publishedYes

Fingerprint

Capacitive sensors
Electron beam lithography
Interferometers
Microscopes
Calibration
Scanning
Lasers
lithography
interferometers
microscopes
electron beams
scanning
probes
sensors
lasers

Cite this

Gao-Feng ; Peng, Gwo Sheng ; Koenders, L. / Calibration of transfer standards for SPM. In: Microelectronic Engineering. 1998 ; Vol. 41-42. pp. 615-618.
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Calibration of transfer standards for SPM. / Gao-Feng; Peng, Gwo Sheng; Koenders, L.

In: Microelectronic Engineering, Vol. 41-42, 03.1998, p. 615-618.

Research output: Contribution to journalArticle

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