Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation

M. Kolbe, B. Beckhoff, M. Krumrey, M. Reading, J. Van Den Berg, T. Conard, S. De Gendt

Research output: Contribution to journalArticle

3 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Characterisation of high-k containing nanolayers by reference-free X-ray fluorescence analysis with synchrotron radiation'. Together they form a unique fingerprint.

Engineering & Materials Science