Characterisation of low energy antimony (2-5 keV) implantation into silicon

Erik J.H. Collart, David Kirkwood, J. A. Van Den Berg, M. Werner, Wilfried Vandervorst, Bert Brijs, P. Bailey, T. C.Q. Noakes

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

8 Citations (Scopus)

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