Characterization of an ultrashallow junction structure using angle resolved x-ray photoelectron spectroscopy and medium energy ion scattering

G. Saheli, G. Conti, Y. Uritsky, M. A. Foad, C. R. Brundle, P. MacK, D. Kouzminov, M. Werner, J. A. Van Den Berg

Research output: Contribution to journal › Article › peer-review

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