Characterization of Nitrogen-Doped TiO2 Films Prepared by Arc Ion Plating without Substrate Heating in Various N2/O2 Gas Mixture Ratios

Hsing Yu Wu, Wen Chun Huang, Jyh Liang Wang, Guoyu Yu, Yung Shin Sun, Jin Cherng Hsu

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Nitrogen-doped TiO2 films exhibit good photocatalytic ability in the visible (VIS) light region. This study reports the fabrication of these films using arc ion plating (AIP) in different ratios of nitrogen partial pressure (PN2) to oxygen partial pressure (PO2) without substrate heating and/or applied bias. This approach allows a significant broadening of the range of possible substrates to be used. X-ray diffraction (XRD) patterns indicate that these films deposited at room temperature are amorphous, and surface electron microscope (SEM) and atomic force microscope (AFM) images show that they have rough surfaces. Their transmittance and optical properties are measured with a spectrometer and ellipsometer, respectively. In addition, the bandgap energies of these amorphous films are derived by the ellipsometer from the Tauc–Lorentz (TL) model. The results indicate that the N-doped TiO2 film with a PN2/PO2 ratio of 1/4 attains the narrowest bandgap and the highest absorbance in the visible region. It can be attributed to the prominent Ti–N peaks observed in the sample’s Ti and N X-ray photoelectron spectroscopy (XPS) spectra. In addition, verified with the methylene blue (MB) test, this sample exhibits the best photocatalytic performance for its narrowest energy gap.

Original languageEnglish
Article number654
Number of pages15
Issue number3
Publication statusPublished - 20 Mar 2023

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