Abstract
Short wavelength extreme ultra-violet (EUV) lasers pumped by electron collisional excitation in plasmas irradiated by infra-red lasers have achieved saturated output down to wavelengths as short as 5.9 nm [1] and are now used for applications [2, 3]. These lasers operate without mirrors with output due to amplified spontaneous emission (ASE). The beam profiles consist typically of a large number of individual coherent beamlets [4] with a total near-field profile that is typically crescent shaped [5]. Gain profiles are spectrally narrow dependent on thermal Doppler broadening of ions of temperature ∼ 100 - 200 eV. With gain narrowing, this result in pulses of spectral width v/δv < 104. The shortest pulse durations of the output EUV lasers have consequently been close to Fourier transform limited at ≈ 3 ps [6, 7].
| Original language | English |
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| Title of host publication | 2009 IEEE LEOS Annual Meeting Conference Proceedings, LEOS '09 |
| Pages | 108-109 |
| Number of pages | 2 |
| DOIs | |
| Publication status | Published - 1 Dec 2009 |
| Externally published | Yes |
| Event | 2009 IEEE LEOS Annual Meeting Conference - Belek-Antalya, Turkey Duration: 4 Oct 2009 → 8 Oct 2009 https://ieeexplore.ieee.org/xpl/conhome/5339380/proceeding |
Conference
| Conference | 2009 IEEE LEOS Annual Meeting Conference |
|---|---|
| Abbreviated title | LEOS '09 |
| Country/Territory | Turkey |
| City | Belek-Antalya |
| Period | 4/10/09 → 8/10/09 |
| Internet address |