Comparison of the subsurface damage induced when precision grinding ULE® and Zerodur® surfaces

X. Tonnellier; P. Shore; P. Morantz; A. Baldwin; R. Evans; D. D. Walker

Comparison of the subsurface damage induced when precision grinding ULE® and Zerodur® surfaces

X. Tonnellier, P. Shore, P. Morantz, A. Baldwin, R. Evans, D. D. Walker

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

A precise and rapid grinding process, with low levels of surface waviness and subsurface damage, can improve the total cycle time for producing large ULE® and Zerodur® optics. In this paper, the subsurface damage level of ULE® and Zerodur® were investigated and compared. Resin bonded diamond cup wheels were employed. The grinding response was characterized by measuring: surface roughness, surface profile and subsurface damage. The amount of defects beneath ULE® and Zerodur® surfaces ground using the selected grinding mode were compared. The observed subsurface damage can be separated in two distinct depth zones, the first 'process' related and the second being 'machine dynamics' related.

Original language	English
Title of host publication	Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007
Publisher	euspen
Pages	279-288
Number of pages	10
ISBN (Electronic)	9780955308239
Publication status	Published - 1 Jan 2007
Externally published	Yes
Event	8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance - Cranfield, United Kingdom Duration: 25 Jun 2007 → 28 Jun 2007 Conference number: 8

Conference

Conference	8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance
Abbreviated title	LAMDAMAP 2007
Country/Territory	United Kingdom
City	Cranfield
Period	25/06/07 → 28/06/07

Cite this

Tonnellier, X., Shore, P., Morantz, P., Baldwin, A., Evans, R., & Walker, D. D. (2007). Comparison of the subsurface damage induced when precision grinding ULE® and Zerodur® surfaces. In Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007 (pp. 279-288). euspen.

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title = "Comparison of the subsurface damage induced when precision grinding ULE{\textregistered} and Zerodur{\textregistered} surfaces",

abstract = "A precise and rapid grinding process, with low levels of surface waviness and subsurface damage, can improve the total cycle time for producing large ULE{\textregistered} and Zerodur{\textregistered} optics. In this paper, the subsurface damage level of ULE{\textregistered} and Zerodur{\textregistered} were investigated and compared. Resin bonded diamond cup wheels were employed. The grinding response was characterized by measuring: surface roughness, surface profile and subsurface damage. The amount of defects beneath ULE{\textregistered} and Zerodur{\textregistered} surfaces ground using the selected grinding mode were compared. The observed subsurface damage can be separated in two distinct depth zones, the first 'process' related and the second being 'machine dynamics' related.",

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year = "2007",

month = jan,

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booktitle = "Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007",

publisher = "euspen",

address = "United Kingdom",

note = "8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007 ; Conference date: 25-06-2007 Through 28-06-2007",

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Tonnellier, X, Shore, P, Morantz, P, Baldwin, A, Evans, R & Walker, DD 2007, Comparison of the subsurface damage induced when precision grinding ULE® and Zerodur® surfaces. in Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007. euspen, pp. 279-288, 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, Cranfield, United Kingdom, 25/06/07.

Comparison of the subsurface damage induced when precision grinding ULE® and Zerodur® surfaces. / Tonnellier, X.; Shore, P.; Morantz, P. et al.

Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007. euspen, 2007. p. 279-288.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Morantz, P.

AU - Baldwin, A.

AU - Evans, R.

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BT - Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007

PB - euspen

T2 - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance

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Comparison of the subsurface damage induced when precision grinding ULE® and Zerodur® surfaces

Abstract

Conference

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