Comparison of the subsurface damage induced when precision grinding ULE® and Zerodur® surfaces

X. Tonnellier, P. Shore, P. Morantz, A. Baldwin, R. Evans, D. D. Walker

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

A precise and rapid grinding process, with low levels of surface waviness and subsurface damage, can improve the total cycle time for producing large ULE® and Zerodur® optics. In this paper, the subsurface damage level of ULE® and Zerodur® were investigated and compared. Resin bonded diamond cup wheels were employed. The grinding response was characterized by measuring: surface roughness, surface profile and subsurface damage. The amount of defects beneath ULE® and Zerodur® surfaces ground using the selected grinding mode were compared. The observed subsurface damage can be separated in two distinct depth zones, the first 'process' related and the second being 'machine dynamics' related.

Original languageEnglish
Title of host publicationLaser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007
Publishereuspen
Pages279-288
Number of pages10
ISBN (Electronic)9780955308239
Publication statusPublished - 1 Jan 2007
Externally publishedYes
Event8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance - Cranfield, United Kingdom
Duration: 25 Jun 200728 Jun 2007
Conference number: 8

Conference

Conference8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance
Abbreviated titleLAMDAMAP 2007
CountryUnited Kingdom
CityCranfield
Period25/06/0728/06/07

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Tonnellier, X., Shore, P., Morantz, P., Baldwin, A., Evans, R., & Walker, D. D. (2007). Comparison of the subsurface damage induced when precision grinding ULE® and Zerodur® surfaces. In Laser Metrology and Machine Performance VIII - 8th International Conference and Exhibition on Laser Metrology, Machine Tool, CMM and Robotic Performance, LAMDAMAP 2007 (pp. 279-288). euspen.