Comparison of Ti-Zr-V nonevaporable getter films deposited using alloy or twisted wire sputter-targets

R. Valizadeh, O. B. Malyshev, J. S. Colligon, A. Hannah, V. M. Vishnyakov

Research output: Contribution to journalArticle

11 Citations (Scopus)

Abstract

A comparison of the performance of nonevaporable getter (NEG) films deposited using two different types of targets has been made to find the one that has the best pumping properties. For the first time, the NEG coating was deposited using a preformed Ti-Zr-V alloy target. The NEG film characterization and pumping properties have been studied in comparison with a film deposited using the commonly used three-wire twisted target. It was demonstrated that the alloy target produces a NEG coating with uniform composition both laterally and in depth. The composition of the film was found to be the same as the target. Film topography and microstructure with 5 nm grain sizes were found to be the same for both targets. The main result is that the activation temperature of the NEG coating deposited using the Ti-Zr-V alloy target is 160 °C, which is 20 °C lower than for NEG coatings deposited using three twisted wires.

Original languageEnglish
Pages (from-to)1404-1412
Number of pages9
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume28
Issue number6
DOIs
Publication statusPublished - 1 Nov 2010
Externally publishedYes

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