Comparison Study of Algorithms and Accuracy in the Wavelength Scanning Interferometry

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17 Citations (Scopus)

Abstract

Wavelength scanning interferometry (WSI) can be used for surface measurement with discontinuous surface profiles by producing phase shifts without any mechanical scanning process. The choice of algorithms for the WSI to analyze the fringe pattern depends on the desired accuracy and computing speed. This paper provides comparison of four different algorithms to analyze the interference fringe pattern acquired from WSI. The mathematical description of these algorithms, their computing resolution, and speed are presented. Two step-height samples are measured using the WSI. Experimental results demonstrate that the accuracy of measuring surface height varies from micrometer to nanometer value depending on the algorithm used to analyze the captured interferograms.

Original languageEnglish
Pages (from-to)8854-8862
Number of pages9
JournalApplied Optics
Volume51
Issue number36
Publication statusPublished - 20 Dec 2012

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Interferometry
interferometry
Scanning
Wavelength
scanning
wavelengths
diffraction patterns
Surface measurement
Phase shift
micrometers
phase shift
interference
profiles

Cite this

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Comparison Study of Algorithms and Accuracy in the Wavelength Scanning Interferometry. / Jiang, Xiangqian; Muhamedsalih, Hussam; Gao, Feng.

In: Applied Optics, Vol. 51, No. 36, 20.12.2012, p. 8854-8862.

Research output: Contribution to journalArticle

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