TY - JOUR
T1 - Composition and structure of the native Si oxide by high depth resolution medium energy ion scatering
AU - Al-Bayati, Amir H.
AU - Orrman-Rossiter, Kevin G.
AU - van den Berg, J. A.
AU - Armour, D. G.
PY - 1991/1/1
Y1 - 1991/1/1
N2 - The structure and composition of the native Si oxide were studied using high depth resolution medium energy ion scattering (MEIS) spectrometry. The analysis revealed that the oxide is an amorphous material of thickness 20 Å. The results showed qualitatively that the interface between the oxide and the underlying structure consists of layers of Si atoms displaced from their normal lattice sites. The composition of the native Si oxide varies with depth. The region near the surface is more highly oxidized than that near the interface. However, based on the assumption that there are two nonregistered Si layers in the interface, the results showed that the oxide consists of a layer of stoichiometric SiO2 of thickness ∼ 7 Å and a layer of suboxide (SiOx, x < 2) of thic ∼ 6 Å.
AB - The structure and composition of the native Si oxide were studied using high depth resolution medium energy ion scattering (MEIS) spectrometry. The analysis revealed that the oxide is an amorphous material of thickness 20 Å. The results showed qualitatively that the interface between the oxide and the underlying structure consists of layers of Si atoms displaced from their normal lattice sites. The composition of the native Si oxide varies with depth. The region near the surface is more highly oxidized than that near the interface. However, based on the assumption that there are two nonregistered Si layers in the interface, the results showed that the oxide consists of a layer of stoichiometric SiO2 of thickness ∼ 7 Å and a layer of suboxide (SiOx, x < 2) of thic ∼ 6 Å.
UR - http://www.scopus.com/inward/record.url?scp=0025889523&partnerID=8YFLogxK
U2 - 10.1016/0039-6028(91)90214-D
DO - 10.1016/0039-6028(91)90214-D
M3 - Article
AN - SCOPUS:0025889523
VL - 241
SP - 91
EP - 102
JO - Surface Science Letters
JF - Surface Science Letters
SN - 0039-6028
IS - 1-2
ER -